2019
DOI: 10.1038/s41598-019-53236-9
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Precise determination of surface band bending in Ga-polar n-GaN films by angular dependent X-Ray photoemission spectroscopy

Abstract: We present a systematic study of surface band bending in Ga-polar n-GaN with different Si doping concentrations by angular dependent X-ray photoelectron spectroscopy (ADXPS). The binding energies of Ga 3d and N 1 s core levels in n-GaN films increase with increasing the emission angle, i. e., the probing depth, suggesting an upward surface band bending. By fitting the Ga 3d core level spectra at different emission angles and considering the integrated effect of electrostatic potential, the core level energy at… Show more

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Cited by 21 publications
(14 citation statements)
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“…for n-GaN and downward −1.6 eV for p-GaN. [41][42][43] If our hypothesis is correct, the effect of the implantation-induced surface charges seems to override these natural band-bendings. We also checked for a possible influence of the fluence rate of implantations by varying the 27 Mg beam current over an order of magnitude, but no such effect was found.…”
Section: Resultsmentioning
confidence: 73%
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“…for n-GaN and downward −1.6 eV for p-GaN. [41][42][43] If our hypothesis is correct, the effect of the implantation-induced surface charges seems to override these natural band-bendings. We also checked for a possible influence of the fluence rate of implantations by varying the 27 Mg beam current over an order of magnitude, but no such effect was found.…”
Section: Resultsmentioning
confidence: 73%
“…Note that without artificial surface charges there is an upward band-bending around +1.5 eV for n-GaN and downward −1.6 eV for p-GaN. [41][42][43] b) In p-type GaN:Mg [Figure 2 (2.5×10 6 events), i.e. more than three times faster.…”
Section: Resultsmentioning
confidence: 99%
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“…Given that the probing depth of XPS for GaN is about 5-6 nm (ref. 33 ), such a difference in signal-to-noise ratio (Fig. 3c-f and Supplementary Fig.…”
mentioning
confidence: 92%
“…Based on the apparent binding energy and line shape in ADXPS measurements, surface band bending and internal potential gradient can be calculated. 33 The principle and calculation method have been speci ed previously. [33][34][35][36] Brie y, a measured apparent core level spectrum is actually an integration of photoelectrons emitting from a depth of d 0 , and can be given by Declarations Figures Figure 1 (a) Ball model of Td-WTe2 with surface oxidation.…”
Section: Methodsmentioning
confidence: 99%