2012
DOI: 10.1088/0957-4484/23/40/405301
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Precise control of the size and noise of solid-state nanopores using high electric fields

Abstract: We present a methodology for preparing silicon nitride nanopores that provides in situ control of size with sub-nanometer precision while simultaneously reducing electrical noise by up to three orders of magnitude through the cyclic application of high electric fields in an aqueous environment. Over 90% of nanopores treated with this technique display desirable noise characteristics and readily exhibit translocation of double-stranded DNA molecules. Furthermore, previously used nanopores with degraded electric… Show more

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Cited by 91 publications
(123 citation statements)
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References 34 publications
(42 reference statements)
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“…Typically this is achieved by performing a piranha clean on the chip, which employs a sulfuric acid and hydrogen peroxide solution [20]. Unfortunately, this harsh treatment frequently leads to enlargement of the nanopore and thus negates the benefits of being able to visually inspect the nanopore with the TEM to confirm nanopore size and geometry [17,19].…”
Section: Temmentioning
confidence: 99%
See 1 more Smart Citation
“…Typically this is achieved by performing a piranha clean on the chip, which employs a sulfuric acid and hydrogen peroxide solution [20]. Unfortunately, this harsh treatment frequently leads to enlargement of the nanopore and thus negates the benefits of being able to visually inspect the nanopore with the TEM to confirm nanopore size and geometry [17,19].…”
Section: Temmentioning
confidence: 99%
“…Conveniently, a computer program can be used to interrupt the voltage immediately after the current reaches a certain threshold. This immediate voltage shutoff is important to maintain a small pore size, as a large voltage applied to an existing nanopore tends to grow the pore, and it can easily reach sizes that are too large to be useful [20]. decayed (which can take ~1-2 s), a stable leakage current is measured, which slowly decays.…”
Section: Controlled Dielectric Breakdownmentioning
confidence: 99%
“…While the protocol described can be applied to solid-state nanopores of various material fabricated using any method, they are commonly drilled by TEM using previously established protocols 11,14 . Nanopores drilled by TEM are typically between 4-8 nm in diameter (Figure 2).…”
Section: Representative Resultsmentioning
confidence: 99%
“…The ionic current through solid-state nanopores can also suffer from high noise, the sources of which are an intensely investigated topic in nanopore literature 2,3,10,11 . While various methods have been proposed to reduce electrical noise, the yield of reliable, stable low-noise nanopores is typically low.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, increase in conductance during experiment has been attributed to changes in pore radius [12, 20], however, both the diameter and pore thickness are expected to play a role in pore conductance. Plan-view TEM images similar to those in Figure 1A that give the pore diameter and thin film measurements of the membrane thickness supporting the pore are typically the only information used to estimate pore conductance.…”
Section: Introductionmentioning
confidence: 99%