Preactuated multirate feedforward for a high-precision stage with continuous time unstable zeros

Beyond Performance/Cost Tradeoffs in Motion Control: A Multirate Feedforward Design With Application to a Dual-Stage Wafer System

“…i.e., let α ∈ R N , N ∈ N and let β ∈ R F N be given by 9, then β = H F α with H F in (11). Examples of D F and H F are provided by Example 2.…”