2020
DOI: 10.1116/6.0000661
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Practical guide to the use of backgrounds in quantitative XPS

Abstract: This guide is intended for both the novice in x-ray photoelectron spectroscopy (XPS) as well as users with some experience. XPS is one of the most widely used methods to characterize surface nanostructured samples, and XPS is now also commonly accessible to most material scientists through XPS facility centers. It is, therefore, increasingly used as a routine analysis technique to complement other techniques. This has led to an increase in the number of users who may not have a full understanding of the detail… Show more

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Cited by 95 publications
(89 citation statements)
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“…These higher photon energies result in photoelectrons with substantially larger inelastic mean free paths (IMFP or λ ) and thereby larger probing depths. It is well established that quantification based on XPS peak areas can be highly inaccurate 1 because of the peak attenuation factor that varies strongly with the atom depth distribution. This can be solved by including in the analysis, the background of inelastically scattered electrons, which is always seen on the low kinetic energy side of XPS peaks.…”
Section: Introductionmentioning
confidence: 99%
“…These higher photon energies result in photoelectrons with substantially larger inelastic mean free paths (IMFP or λ ) and thereby larger probing depths. It is well established that quantification based on XPS peak areas can be highly inaccurate 1 because of the peak attenuation factor that varies strongly with the atom depth distribution. This can be solved by including in the analysis, the background of inelastically scattered electrons, which is always seen on the low kinetic energy side of XPS peaks.…”
Section: Introductionmentioning
confidence: 99%
“…With the increase of analyte concentration, the fluorescence quenching effect of the LNUs became more obvious and quenched completely ( Figure 5 a–d). In order to better explain this phenomenon, X-ray photoelectron spectroscopy (XPS) was used to calculate the relative content of each element (C, N, F, Cl) corresponding to the amount of pesticide adsorbed into the POP architecture [ 39 , 40 , 41 , 42 , 43 , 44 , 45 ]. As shown in Figure S7 , the adsorption uptakes were calculated to be 116.0 mg g −1 (NF-adsorbed LNU-45), 70.0 mg g −1 (CTL-adsorbed LNU-45), 139.8 mg g −1 (DCN-adsorbed LNU-45), and 231.9 mg g −1 (TFL-adsorbed LNU-45).…”
Section: Resultsmentioning
confidence: 99%
“…2c . The Tougaard background considers the inelastic scattering of the electrons, and is widely used in photoemission spectroscopy 36 , 37 . The spectral lineshape after background subtraction is nicely fit to a principal peak along with three replica peaks that follow the relation in Eq.…”
Section: Resultsmentioning
confidence: 99%