Power efficient, low loss and ultra-high isolation RF MEMS switch dedicated for antenna switch applications

Mirzajani, Hadi; Ilkhechi, Afshin Kashani; Zolfaghari, Parviz; Azadbakht, Mostafa; Aghdam, Esmaeil Najafi; Ghavifekr, Habib Badri

doi:10.1016/j.mejo.2017.09.004

Cited by 22 publications

(3 citation statements)

References 38 publications

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“…Recent advancements in smart and portable systems demand miniaturized systems offering numerous functionality such as high speed, high resolution, ultra efficiency in performance, and most importantly, all these are achieved at the lowest possible cost [1][2][3][4][5]. MEMSs have brought revolutionary changes in the design of efficient systems, whether it is in the field of communication, sensing [6,7], biomedicals [8][9][10], safety instruments [11], food units [12], car manufacturing units [13,14], or sensor technologies.…”

Section: Introductionmentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and reliability, and the impact of these switches on diverse technological domains. The review critically analyzes the influence of design parameters, actuation mechanisms, and material properties on the performance of MEMS switches. Additionally, it explores recent advancements, breakthroughs, and innovative solutions proposed by researchers to address these challenges. The synthesis of the existing literature not only elucidates the current state of MEMS switch technology but also paves the way for future research avenues. The findings presented herein serve as a valuable resource for researchers, engineers, and technologists engaged in advancing MEMS switch technology, offering insights into the current landscape and guiding future endeavors in this rapidly evolving field.

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Section: Introductionmentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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“…For better precision of operating frequency, incorporation of RF MEMS switches is the better option. PiN diodes, FET transistors, and the RF MEMS switches are the popular Radio Frequency switches [3]. However, RF MEMS switches have proved their ability to design reconfigurable antennas because of high linearity and low power consumption [4].…”

Section: Introductionmentioning

confidence: 99%

Electrostatic and Electromagnetic Parametric Analysis of RF MEMS Switches for Reconfigurable Antenna

Sathuluri,

2023

Preprint

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This work presents RF MEMS switch design, packaging and incorporation in patch antenna. Electrostatic and Electromagnetic parametric analysis is performed. The RF MEMS switch packaging aspects also highlight. Novel configuration of MEMS switch, and antenna performance was studied in 0.5–40 GHz frequency range. A modified serpentine membrane is designed and simulated, offering a low actuation voltage of 5 V, switching time of 100 µs, and damping duration is 1.6 ms. The switch design is extended up to packaging by extracting contacts. Diamond shape patch is considered for antenna design. Two identical switches are used to design a reconfigurable antenna, where frequency reconfigurability is analyzed under different switching conditions. The proposed antenna is found suitable for X, and K band applications

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“…Recently, microelectromechanical systems (MEMS) technology has introduced novel devices and techniques to replace solid-state counterparts in different applications like radio frequency circuits, wearable devices, and Internet of Things (IoT) as the result of their excellent performance in insertion loss, isolation, linearity, power consumption, and low cost of fabrication. [3][4][5][6][7][8][9][10] Of particular importance are DC-contact series switches which have numerous applications in RF systems such as switched delay line phase shifters, 11 reconfigurable antennas, 12 reconfigurable networks, [13][14][15] and switching networks. 11,16,17 RF MEMS switches are microscale mechanical devices fabricated by traditional integrated circuit (IC) fabrication techniques, and their operating characteristics are dependent on their mechanical design.…”

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confidence: 99%

A high contact force and high‐isolation radio‐frequency microelectromechanical systems switch for radio‐frequency front‐end applications

Dadgar

Aghdam

2022

Circuit Theory & Apps

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A new structure for low‐loss and high‐isolation radio‐frequency microelectromechanical systems (RF MEMS) switches is presented. The high contact force of the switch leads to very small ranges for contact resistance which is the main constrain of DC‐contact RF MEMS switches. The contact resistance of the switch is 27 mΩ leading to negligible thermal noise which is one of the most important parameters for devices operating at RF front‐ends immediately after the antenna where there is not any active stage. The switch is composed of two actuators: an electrothermal actuator for actuation of the switch from OFF to ON state and an electrostatic actuator to hold the switch at ON state. The insertion loss, return loss, and isolation of the switch for frequencies below 70 GHz are −0.35, −20, and −10 dB, respectively. The contact force and contact resistance of the switch are 0.93 mN and 0.027 Ω, respectively. Electrothermal and electrostatic actuators require 0.91 and 50 actuation voltages, respectively. During the ON‐state, the power consumption of the switch is near zero. The low contact resistance and high‐isolation characteristics of the switch make it very suitable for mobile front‐ends.

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Power efficient, low loss and ultra-high isolation RF MEMS switch dedicated for antenna switch applications

Cited by 22 publications

References 38 publications

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Electrostatic and Electromagnetic Parametric Analysis of RF MEMS Switches for Reconfigurable Antenna

A high contact force and high‐isolation radio‐frequency microelectromechanical systems switch for radio‐frequency front‐end applications

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