Abstract:The efficiency of radio-frequency (RF) power absorption, RF magnetic field structure and plasma parameters were measured in cylindrical inductive RF plasma sources 20 cm in diameter and 22, 32, 53 cm in length with a low value external magnetic field. The experiments were carried out in argon at pressures of 13-140 mPa. The RF power supply changed from 200 W to 800 W. The spiral antenna was used for sustaining the discharge. It was shown that efficiency of RF power absorption depended nonlinearly on the extern… Show more
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