2019
DOI: 10.1016/j.ijrmhm.2019.105081
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Powder metallurgic fabricated plug targets for the synthesis of AlCrSiWN multicomponent coating systems

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Cited by 5 publications
(4 citation statements)
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“…According to our previous study, slight Si (~3 at.%) and W (~1.6 at.%) incorporations, which were accompanied by a decrease in the aluminum content, can also result in a significant coarsened columnar growth of AlCrSiWN when compared to AlCrN. It is assumed that tungsten played a significant role in the coarsening of the morphology due to its higher atomic weight [14]. Alloying AlCrSiN with 11.7 to 14.7 at.% tungsten, by contrast, resulted in a clearly denser film growth.…”
Section: Microstructurementioning
confidence: 94%
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“…According to our previous study, slight Si (~3 at.%) and W (~1.6 at.%) incorporations, which were accompanied by a decrease in the aluminum content, can also result in a significant coarsened columnar growth of AlCrSiWN when compared to AlCrN. It is assumed that tungsten played a significant role in the coarsening of the morphology due to its higher atomic weight [14]. Alloying AlCrSiN with 11.7 to 14.7 at.% tungsten, by contrast, resulted in a clearly denser film growth.…”
Section: Microstructurementioning
confidence: 94%
“…In our recent studies, we have investigated the sputtering of AlCrSiWN using targets that include all coating constituents. In particular, the inert sputtering behavior of tungsten became obvious within these studies [13,14], since the crystallization of W x N y is complex based on the transformations of α-W to fcc W 2 N and to hex WN [15]. This behavior, however, can be influenced by HiPIMS processes with adaptions of the magnetic field strength and the pulsing configuration supporting the growth of dense tungsten nitrides [16].…”
Section: Introductionmentioning
confidence: 99%
“…This effect might be used for some coating solutions requiring a low oxidation rate. The (CrAlSi)N and (AlCrSi)N coatings can also be doped with one additional element to address modifications of various properties, e.g., O [132], Y [133] B [134], W [135,136], Ni [137], and others. Additionally, more than one element was added, e.g., Y and O [138].…”
Section: Coatings With the Addition Of Simentioning
confidence: 99%
“…Si-Mo sputtered [142], Si-Ni sputtered [143,144], Si-Ti arc [145,146], Si-W arc [78,135], Si-W sputtered [136], Si-Ni sputtered [137], Si-C sputtered [133,147], Si-B sputtered [134], Si-Mg [148], Ti-C sputtered [114], MoCu sputtered [106], Si-Y-O sputtered [138], Ti-Si-Y arc [149], and Nb-Ti-Si sputtered [150].…”
Section: Coatings With the Addition Of Two Or More Elementsmentioning
confidence: 99%