Potential of solid immersion lithography using I-line and KrF light source

Nam, Dongseok; Milster, Tom D.; Chen, Tao

doi:10.1117/12.600082

Cited by 4 publications

(2 citation statements)

References 7 publications

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“…The solid immersion lens (SIL), invented by Mansfield and Kino in 1990 [1], has been widely used both in scientific research and industrial application, for example, optical storage [2][3][4][5], photolithography [6][7][8], and microscopy [9][10][11][12][13][14][15][16][17][18]. Due to the higher numerical aperture (NA) of a SIL, the SIL microscopy system provides not only higher spatial resolution and improved light collection efficiency, but also the capability of subsurface imaging with good resolution if the refractive index of the substrate is the same as that of the SIL.…”

Section: Introductionmentioning

confidence: 99%

“…Thus, it attracts potential applications in the field of imaging solidstate devices, which have most of the structures buried deep into the substrate. Many researchers also obtained improved resolution in experiments, by using SIL to avoid aberration due to the refractive index mismatch between air and the sample [3,4,8,[17][18][19][20][21].…”

Section: Introductionmentioning

confidence: 99%

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Complete modeling of subsurface microscopy system based on aplanatic solid immersion lens

et al. 2012

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A general model of a subsurface microscopy system based on an aplanatic solid immersion lens (ASIL) is presented. This model is composed of three components: generation of incident light into the ASIL, interaction of the incident light with the sample, and imaging of the scattered light. Interaction of incident light with sample can be calculated numerically using electromagnetic scattering theory, while vector diffraction theory is used to treat the other two components. Examples of imaging small and extended scatterers are shown. For small scatterers, we show the differences between the actual resolution of the whole system and the resolution predicted by considering only one subsystem of the whole system. For extended scatterers, two types of illuminations-focusing light illumination and plane wave direct illumination-are used to image the scatterers, and observations are explained using interaction of the incident light with the sample.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Complete modeling of subsurface microscopy system based on aplanatic solid immersion lens

et al. 2012

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Single Wavelength Blue-Laser Optical Head-Like Opto-Mechanical System for Turntable Thermal Mode Lithography and Stamper Fabrication

et al. 2011

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Properties of induced polarization evanescent reflection with a solid immersion lens (SIL)

Chen

Milster

2007

Opt. Express

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Properties of the induced polarization signal with a solid immersion lens (SIL) are investigated by experiments and simulations. A LaSFN9 SIL (NA=1.5) is used in the experiment. Physics of the induced polarization signal are described for several configurations of optical systems and substrates. Induced polarization signals from evanescent-wave coupling to dielectric, semiconductor and metal substrates are studied in detail. It is shown that surface plasmon waves are excited with Au substrates and the induced polarization signal is affected by the surface plasmon waves. Simulation results of the induced polarization signal for a gallium phosphide SIL (NA=2.64) are discussed.

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Potential of solid immersion lithography using I-line and KrF light source

Cited by 4 publications

References 7 publications

Complete modeling of subsurface microscopy system based on aplanatic solid immersion lens

Complete modeling of subsurface microscopy system based on aplanatic solid immersion lens

Single Wavelength Blue-Laser Optical Head-Like Opto-Mechanical System for Turntable Thermal Mode Lithography and Stamper Fabrication

Properties of induced polarization evanescent reflection with a solid immersion lens (SIL)

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