Extended Abstracts of the 2011 International Conference on Solid State Devices and Materials 2011
DOI: 10.7567/ssdm.2011.c-9-2
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Potential Characterization of Interconnect Corrosion by Kelvin Probe Force Microscopy

Masahito Kodera
1
,
Yasuhito Yoshimizu
2
,
Kanae Uchida
3
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