Postfabrication Phase Error Correction of Silicon Photonic Circuits by Single Femtosecond Laser Pulses

Bachman, Daniel; Chen, Zhijiang; Wang, Christopher; Fedosejevs, R.; Tsui, Ying Y.; Van, Vien

doi:10.1109/jlt.2016.2633317

Cited by 11 publications

(9 citation statements)

References 27 publications

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“…Various post-fabrication resonance tuning schemes for onchip integrated planar WGM cavities have been investigated, which mainly focus on the real part of mode energies. [36][37][38][39][40][41] Among them, EBID as a convenient and precise tool has been employed for generating additional 3D nanostructures, such as nanopillars on top of microdisks [42] and photonic crystals. [43] In the EBID method, released gaseous molecules get decomposed under the irradiation of a focused electron beam, resulting in the growth of nonvolatile structures on the focus site.…”

Section: Working Principlementioning

confidence: 99%

Steering Directional Light Emission and Mode Chirality through Postshaping of Cavity Geometry

Wang

Tang

Yang

et al. 2020

Laser & Photonics Reviews

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Dielectric optical microcavities have been explored as an excellent platform to manipulate the light flow and investigate non-Hermitian physics in open optical systems. For whispering gallery mode optical microcavities, modifying the rotational symmetry is highly desirable for intriguing phenomena such as degenerated chiral modes and directional light emission. However, for the state-of-the-art approaches, namely deforming the cavity geometry by precision lithography or introducing local scatterers near the cavity boundary via micromanipulation, there is a lack of flexibility in fine-adjusting of chiral symmetry and far-field emission direction. Here, precise engineering of cavity boundary using electron-beam-induced deposition is reported based on rolled-up nanomembrane-enabled spiral-shaped microcavities. The deformation of outer boundary results in delicate tailoring of asymmetric backscattering between the outer and inner rolling edges, and hence deterministically strong mode chirality. Besides, the crescent-shaped high-index nanocap leads to modified light tunneling channels and inflected far-field emission angle. It is envisioned that such a localized deposition-assisted technique for adjusting the structural deformation of 3D optical microcavities will be highly useful for understanding rich insights in non-Hermitian photonics and unfolding exotic properties on lasing, sensing, and cavity quantum electrodynamics.

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Section: Working Principlementioning

confidence: 99%

Steering Directional Light Emission and Mode Chirality through Postshaping of Cavity Geometry

Wang

Tang

Yang

et al. 2020

Laser & Photonics Reviews

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“…Existing nonvolatile post-processing trimming methods usually change the refractive index of the waveguide core or cladding through various post-processing methods, mainly including the following types of schemes: 1. Switch the waveguide core material between the crystalline and amorphous states by illuminating the waveguide with the femtosecond (Fs) laser [ 23 , 24 , 25 , 26 , 27 ], thermal annealing after germanium (Ge) implantation [ 28 , 29 ], and so on. The Fs laser converts the silicon waveguide from a crystalline state to an amorphous state, increasing the waveguide core refractive index.…”

Section: Introductionmentioning

confidence: 99%

“…The Fs laser converts the silicon waveguide from a crystalline state to an amorphous state, increasing the waveguide core refractive index. This technology adopts a single laser shot with little additional light propagation loss but lacks processing accuracy [ 23 , 24 , 25 , 26 , 27 ]. Ge implant makes the waveguide amorphous, which can recrystallize rapidly through annealing.…”

Section: Introductionmentioning

confidence: 99%

Post-Processing Trimming of Silicon Photonic Devices Using Femtosecond Laser

Shang

Zheng

et al. 2023

Nanomaterials

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Fabrication errors inevitably occur in device manufacturing owing to the limited processing accuracy of commercial silicon photonic processes. For silicon photonic devices, which are mostly processing-sensitive, their performances usually deteriorate significantly. This remains an unsolved issue for mass production, particularly for passive devices, because they cannot be adjusted once fixed in processes. This study presents a post-processing trimming method to compensate for fabrication errors by changing the cladding equivalent refractive indices of devices with femtosecond lasers. The experimental results show that the resonant wavelengths of micro-ring resonators can be regularly shifted within their free spectral range via tuning the illuminating area, focusing position, emitting power, and scanning speed of the trimming femtosecond laser with an acceptable loss increase. These experiments, as well as the trimming experiments in improving the phase balance of Mach-Zehnder interferometer switches, indicate that the femtosecond laser trimming method is an effective and fast method for silicon photonic devices.

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“…Tuning the WGM resonances has been widely studied over the past decade, which is particularly important in practical applications such as aligning the resonances in optical switches, coupled-resonator optical waveguides (CROWs), , or cavity quantum electrodynamics (cQED) systems with quantum emitters . Other than the well-known thermo-optic tuning of WGM modes, , post-fabrication trimming of optical modes in WGM optical microcavities has also been explored using novel methods, such as electron beam compaction, nano-oxidation, femtosecond laser irradiation, and multistep wet etching . Axial modes in microcapillaries can be modified by altering the size of the central bulge .…”

mentioning

confidence: 99%

“…For most of the previous demonstrations of WGM resonance trimming, − , only a weak perturbation is applied to the cavity geometry or refractive index distribution, which shifts the resonance mode energies (Δ E / E is on the order of 10 –4 to 10 –3 ). An effective tuning of the mode spacing is technically difficult because it requires a strong modification of the cavity round-trip length.…”

mentioning

confidence: 99%

External Strain Enabled Post-Modification of Nanomembrane-Based Optical Microtube Cavities

Wang

Yin

et al. 2018

ACS Photonics

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Optical microtube cavities formed by self-rolling of pre-strained nanomembranes feature unique optical resonance properties for both fundamental and applied research. A post-fabrication treatment of the microcavities made of rolled-up nanomembranes is attractive in order to better manipulate and control the optical modes therein. Here, we report a new approach of modifying the resonant modes by applying external strain using a stretchable polymer substrate. The properties of both azimuthal and higher order axial modes are systematically investigated by varying external strain along the tube axial direction. The post-treatment process leads to a spectral redshift and improvement of quality factors, which is attributed to a modification of tube shape and interlayer compactness. For tubes with axial confinement, the measurements suggest that both the eigenenergies and mode spatial distributions of optical axial modes get significantly modified after applying the external strain. Our numerical calculation results show good agreement with the experimental results. This work reports a simple and robust strain-based modification scheme for manipulating the resonant mode energies, mode spacing, and mode field distributions.

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Postfabrication Phase Error Correction of Silicon Photonic Circuits by Single Femtosecond Laser Pulses

Cited by 11 publications

References 27 publications

Steering Directional Light Emission and Mode Chirality through Postshaping of Cavity Geometry

Steering Directional Light Emission and Mode Chirality through Postshaping of Cavity Geometry

Post-Processing Trimming of Silicon Photonic Devices Using Femtosecond Laser

External Strain Enabled Post-Modification of Nanomembrane-Based Optical Microtube Cavities

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