Post processing of microstructures by PDMS spray deposition

All evaporation submicron lift-off lithography process with negative e-beam QSR-5 resist

“…QSR-5 is a negative resist constituted of nonpolymeric sterol molecules [12]. Contrary to most spray coating resist [13,14], it permits to obtain the desired thickness, from very thin film thickness as low as 10 nm or thick layer associated to a highly uniform. Another advantage is the very high resolution, permitting to define patterns as thin as sub-100 nm.…”

Spectroscopic ellipsometry as a complementary tool to characterize coatings on PDMS for CE applications

“…Under the selected conditions, the attachment reaction proceeds rather quickly, leading to the deposition of a layer of PDMS covalently linked to the substrate by a head‐to‐surface arrangement . The PDMS‐coated wafers were rinsed with dichloromethane to remove any unbound molecules, dried under N 2 , and used within 24 h. In contrast with previously reported procedures , this simple strategy allowed the formation of uniform layers of PDMS with well‐defined thickness and minimum roughness. The formation of the PDMS layer was verified by ellipsometry ( vide infra ) at an incident angle of 70° (with respect to the substrate) and with a range of wavelengths between 250 and 800 nm.…”

Captive-air-bubble aerophobicity measurements of antibiofouling coatings for underwater MEMS devices

“…9 Generally, it is formed as a viscous bicomponent thermosetting mixture between a matrix component and a curing agent, and applied by spin-coating, 10 dip-coating, 11 or spray-coating. 12 PDMS could also be incorporated, at different contents, into coatings based on other polymers, such as polyurethane, in order to enhance their antibiofouling properties, as reported in Zhang et al 13 Poly(para-xylylenes) are thermoplastic semicrystalline polymers discovered by Michael Szwarc in the late 1940s and commercialized in 1965. These polymers are synthesized by chemical vapor deposition (CVD) and have very attractive properties, in particular, low sticking coefficient at room temperature, and conformality to different types of substrates.…”