Optical Interference Coatings 2013
DOI: 10.1364/oic.2013.pmb.10
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Post-deposition treatment of IBS coatings for UV applications

Martin Bischoff1,
Tobias Nowitzki2,
Oliver Voß3
et al.

Abstract: IBS coatings were examined after deposition and after a defined annealing process. The optical and mechanical properties were improved significantly. The remaining coating stress can directly be controlled by selected process parameters

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