Post-annealing optimization of the heteroepitaxial La-doped SrSnO₃ integrated on silicon via ALD

Abstract

This study demonstrated the successful epitaxy of La-SrSnO3/BaTiO3 on SrTiO3-buffered Si (001) with ALD-deposited La-SrSnO3 and explored the optimization of post-annealing to enhance the capacitance properties of heterostructure.

Stability Enhancement in Copper-Doped Iron Oxide Resistive Random Access Memory via RF Co-Sputtering

“…Inorganic materials include those with a perovskite structure, such as BiFeO 3 , SrSnO 3 , and CsPbBr 3 . [15][16][17] Organic materials encompass polymers and albumen. 18,19 10,[20][21][22][23][24][25][26][27][28][29][30][31][32][33] Compared to other organic materials, metal oxides are widely studied due to their excellent resistive switching characteristics, relatively lower manufacturing costs, and superior compatibility with CMOS technology.…”