1995
DOI: 10.1016/0022-0248(95)00208-1
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Position dependent growth rate and composition of low pressure organometallic vapour phase epitaxy grown InGaP and AlGaAs on GaAs inverted mesa grooves

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Cited by 15 publications
(1 citation statement)
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“…This effect is especially apparent for the 60 case. This phenomenon can be explained considering the diffusion of growth species from the gas phase towards the susceptor [23,24]. At the susceptor the concentration of GaCl is zero, because it immediately reacts to form solid GaN as soon as it reaches the surface.…”
Section: Resultsmentioning
confidence: 99%
“…This effect is especially apparent for the 60 case. This phenomenon can be explained considering the diffusion of growth species from the gas phase towards the susceptor [23,24]. At the susceptor the concentration of GaCl is zero, because it immediately reacts to form solid GaN as soon as it reaches the surface.…”
Section: Resultsmentioning
confidence: 99%