2018 IEEE Micro Electro Mechanical Systems (MEMS) 2018
DOI: 10.1109/memsys.2018.8346661
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PORT: A piezoelectric optical resonance tuner

Abstract: This abstract presents an aluminum nitride (AlN) piezoelectric actuator for tuning optical resonance modes of silicon nitride photonic resonators. The AlN actuator is fabricated on top of a thick silicon dioxide cladding that encapsulates the nitride resonator and waveguide. The PORT is defined by undercutting the cladding layer with a lateral silicon etch. It tunes the optical wavelength by 20pm on applying 60V to the top electrode with a 0.5nA current draw. The thick oxide cladding preserves the resonator's … Show more

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Cited by 6 publications
(10 citation statements)
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References 11 publications
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“…1(c), excess oxide is etched away from the top of the platform to increase compliance and the ring is positioned close to the edge of the actuation platform to maximize waveguide strain. The responsivity is also significantly higher than similar devices previously demonstrated in aluminum nitride [22][23][24], which used an 800 nm thick and 1.8µm wide silicon nitride waveguide with 2 μm oxide separating the ring from the actuator. The ring modulator design, shown in Figs.…”
Section: Device Architecturementioning
confidence: 75%
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“…1(c), excess oxide is etched away from the top of the platform to increase compliance and the ring is positioned close to the edge of the actuation platform to maximize waveguide strain. The responsivity is also significantly higher than similar devices previously demonstrated in aluminum nitride [22][23][24], which used an 800 nm thick and 1.8µm wide silicon nitride waveguide with 2 μm oxide separating the ring from the actuator. The ring modulator design, shown in Figs.…”
Section: Device Architecturementioning
confidence: 75%
“…There have been attempts to use aluminum nitride to piezoelectrically strain optical waveguides to achieve modulation. This form of modulation allows a larger range of waveguide materials, with previous demonstrations of AlN piezoelectrically modulating AlN waveguides directly [15][16][17][18][19][20][21], and silicon nitride waveguides [22][23][24]. Demonstrations of directly piezoelectrically modulating AlN waveguides suffer from the same high losses at near-visible and shorter wavelengths as mentioned above.…”
Section: Introductionmentioning
confidence: 83%
“…8d) [54]- [56]. Piezoelectric actuation was utilized to tune the optical path length in SiN resonators [57], [58]. Additionally, strain has been used to tune the effective index of waveguides ( Fig.…”
Section: A Phase Shiftersmentioning
confidence: 99%
“…Piezoelectric-based phase shifting, in contrast, does not require deconfined waveguides nor transitions, and as a result, insertion loss can be much lower. The dominant contribution becomes the propagation losses, and even with the largest reported structures, the associated IL remains low [57], [58], [60], [61].…”
Section: A Phase Shiftersmentioning
confidence: 99%
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