1997
DOI: 10.1016/s0040-6090(96)09437-0
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Porous silicon layers used for gas sensor applications

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Cited by 93 publications
(47 citation statements)
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“…On porous Si, the reaction can be thermal [85], photochemical [89,90], or Lewis acid catalyzed [80,81]. (5) Thermal hydrosilylation provides a means to place a wide variety of organic functional groups on a crystalline Si or porous Si surface [80]. The main requirement of the reaction is that the silicon surface contains Si-H species so they can react with a terminal alkene on the organic fragment.…”
Section: Hydrosilylation To Produce Si-c Bondsmentioning
confidence: 99%
See 1 more Smart Citation
“…On porous Si, the reaction can be thermal [85], photochemical [89,90], or Lewis acid catalyzed [80,81]. (5) Thermal hydrosilylation provides a means to place a wide variety of organic functional groups on a crystalline Si or porous Si surface [80]. The main requirement of the reaction is that the silicon surface contains Si-H species so they can react with a terminal alkene on the organic fragment.…”
Section: Hydrosilylation To Produce Si-c Bondsmentioning
confidence: 99%
“…Porous Si has been investigated for applications in microelectronics, optoelectronics, [1][2][3][4] chemical [5,6] and biological [7][8][9][10] sensors, and biomedical devices [11]. The in vivo use of porous Si was first promoted by Leigh Canham, who demonstrated its resorbability and biocompatibility in the mid 1990s [12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%
“…[28] Depositing a selected nanoporous surface with metal oxide nanoparticles/clusters introduces new selective sites on the nanostructured substrate resulting in a modification of the response to a specified analyte gas. It is this etched PS structure that provides both for a combination of rapid Fickian diffusion [2a] into the readily observable micropores followed by a limiting Knudsen diffusion [16] into the nanopore wall coating of the micropores.…”
Section: à2mentioning
confidence: 99%
“…На основании открытого свойства SO 2 гасить ФЛ ПК, предложена модель опти-ческого биосенсора для определения этого экологически вредного газа [62]. О возможно-сти использования ПК для разработки газо-вых сенсоров сообщалось также в работе [63], в которой исследовали электрические харак-теристики (зависимость силы тока от прило-женного напряжения) структуры золото-ПК в условиях наличия разнообразных газов.…”
Section: пористый кремний и сенсорные устройстваunclassified