2020
DOI: 10.3390/s20174942
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Porous Silicon Gas Sensors: The Role of the Layer Thickness and the Silicon Conductivity

Abstract: We studied the influences of the thickness of the porous silicon layer and the conductivity type on the porous silicon sensors response when exposed to ethanol vapor. The response was determined at room temperature (27 ∘C) in darkness using a horizontal aluminum electrode pattern. The results indicated that the intensity of the response can be directly or inversely proportional to the thickness of the porous layer depending on the conductivity type of the semiconductor material. The response of the porous sens… Show more

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Cited by 13 publications
(9 citation statements)
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“…The properties have consequently been determined by the finally achieved pore sizes and depths. The application areas are very wide, and include sensors, catalysts, solar cells, and charge storages [8][9][10][11][12][13][14][15][16][17]. For sensors, Ramírez-González et al controlled the thickness of the PS layer and tested ethanol-sensing performance by measuring conductivity.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…The properties have consequently been determined by the finally achieved pore sizes and depths. The application areas are very wide, and include sensors, catalysts, solar cells, and charge storages [8][9][10][11][12][13][14][15][16][17]. For sensors, Ramírez-González et al controlled the thickness of the PS layer and tested ethanol-sensing performance by measuring conductivity.…”
Section: Introductionmentioning
confidence: 99%
“…For sensors, Ramírez-González et al controlled the thickness of the PS layer and tested ethanol-sensing performance by measuring conductivity. They showed that the thickness is an important factor for a target-sensing gas [14]. Dwivedi et al prepared TiO 2 nanotube-decorated PS, and showed that the heterojunction exhibited a selective ethanol-sensing performance (with sub-ppm level down to 0.5 ppm) and a good linear response at low detection level [15].…”
Section: Introductionmentioning
confidence: 99%
“…The amount of porosity of the samples prepared in this way depends on several parameters, the most important of which are the concentration of the solution, the current density, the etching time, and the intensity of the laser beam applied to the sample [11][12][13]. The influence of laser beam intensity on the amount of porosity and pore diameter of the sample prepared from n-type silicon has been studied in this work, as has the latter's effect on the amount of sensitivity, which has been discussed with the usage of methanol gas [14,15]. When used as a sensor for environmental pollution with toxic gases, the PSi was prepared and studied to determine the effect of the preparation conditions on its properties [16,17].…”
Section: Theoretical Partmentioning
confidence: 99%
“…Porous Si is a promising material for low-temperature gas-sensing applications [ 166 ]. Bang et al [ 167 ] developed heterojunctions based on porous Si and SnO 2 NWs for low-temperature (100 °C) H 2 S gas-sensing applications.…”
Section: Other Resistive-based Gas Sensors (Glass/silicon/mof-based Gas Sensors)mentioning
confidence: 99%