Abstract:In this paper, three-dimensional (3D) porous carbon interdigitated electrode arrays (IDEAs) are developed utilizing standard photolithography of electrospun mats of SU-8 photoresist nanofibers. Porous IDEAs have the potential to produce higher aspect ratio than non-porous electrode due to the reduced stress at the interface between the substrate and the carbon structure [1]. In a first step, a layer of polymeric nanofibers is deposited on a silicon substrate by optimizing the conditions for far-field electrosp… Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.