2015
DOI: 10.1007/s11664-015-4099-4
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Porous Anatase TiO2 Thin Films for NH3 Vapour Sensing

Abstract: Anatase titanium dioxide (TiO 2 ) thin films were deposited onto cleaned glass substrates by a direct current (DC) reactive magnetron sputtering technique for different deposition times from 10 min to 40 min, which resulted in films of different thicknesses. Characterization techniques, such as x-ray diffraction (XRD) and field emission-scanning electron microscopy (FE-SEM) were used to characterize the structural and morphological properties of the TiO 2 thin films. XRD patterns showed the formation of (101) … Show more

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Cited by 11 publications
(6 citation statements)
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“…Response = Z' NH 3 ⁄Z' air (1) It should be noted that for low NH 3 concentrations the sensing units exhibited similar responses, with low error associated to the measurements. That is an important issue to develop sensors able to detect NH 3 below 50 ppm [15][16][17]. In addition, the larger errors at higher concentrations of NH 3 may be associated with the lower stability of the measuring system, since gas injection can cause small turbulences in the airflow system, as observed in the calibration curve of Fig.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Response = Z' NH 3 ⁄Z' air (1) It should be noted that for low NH 3 concentrations the sensing units exhibited similar responses, with low error associated to the measurements. That is an important issue to develop sensors able to detect NH 3 below 50 ppm [15][16][17]. In addition, the larger errors at higher concentrations of NH 3 may be associated with the lower stability of the measuring system, since gas injection can cause small turbulences in the airflow system, as observed in the calibration curve of Fig.…”
Section: Resultsmentioning
confidence: 99%
“…According to the regulatory agency in Brazil, the ammonia exposure level at working places should not exceed 20 ppm within 48 h/week [13], while in England the ammonia exposure should not exceed 25 ppm in 8 h [14]. The human olfactory limit of detection for ammonia is 55 ppm, but loss of sensitivity occurs after long and repeated exposure [15][16][17]. Therefore, designing robust ammonia sensors with low limits of detection is necessary to increase safety and health in such environments [18].…”
Section: Introductionmentioning
confidence: 99%
“…Gas sensing characteristics such as response, selectivity, stability, and detection limit were studied at room temperature and repeated 3 times at different time pattern. Sensing response can be calculated using Ra/Rg, in which Ra and Rg are the measured resistance of the sensing elements in ambient atmosphere and target gas, respectively. …”
Section: Methodsmentioning
confidence: 99%
“…The photocatalytic activity of TiO 2 -anatase may be improved by increasing the porosity of the material [24]. This porosity may be achieved by supporting the TiO 2 on intrinsically porous surfaces, such as, zeolites, inverse opal-like structures, tiles, ceramics or asphalt pavement [8,[25][26][27][28] or by the preparation of porous TiO 2 materials [29][30][31][32][33][34][35][36][37][38][39]. The molecular layer deposition (MLD) technique is a variation of ALD (atomic layer deposition) that makes use of molecular organic and inorganic precursors, thus allowing for the formation of molecular layers or the preparation of hybrid inorganic-organic films.…”
Section: Introductionmentioning
confidence: 99%