Polymethylmethacrylate (PMMA)/CeO 2 hybrid particles for enhanced chemical mechanical polishing performance

Chen, Yang; Li, Zhina; Miao, Naiming

doi:10.1016/j.triboint.2014.10.013

Cited by 73 publications

(33 citation statements)

References 30 publications

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“…Recently, the use of PMMA/CeO 2 nanocomposites in the synthesis of a core/shell structure via the electrostatic interaction and polysiloxane@CeO 2 microspheres with multifunctional properties has been reported [13,27], but until now the effects of the crystallinity and amount of CeO 2 nanoparticles on the thermal stability, mechanical and UV-NIR-shielding properties of these structures have not been reported. In this paper, the preparation and characterization of UV-protective coatings composed of sol-gel-derived CeO 2 nanoparticles and dispersed in a PMMA polymer matrix by single screw extrusion are reported.…”

Section: Introductionmentioning

confidence: 99%

Thermal, Mechanical and UV-Shielding Properties of Poly(Methyl Methacrylate)/Cerium Dioxide Hybrid Systems Obtained by Melt Compounding

et al. 2015

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Thick and homogeneous hybrid film systems based on poly(methyl methacrylate) (PMMA) and CeO2 nanoparticles were synthesized using the melt compounding method to improve thermal stability, mechanical and UV-shielding properties, as well as to propose them for use in the multifunctional materials industry. The effect of the inorganic phase on these properties was assessed by using two different weight percentages of synthesized CeO2 nanoparticles (0.5 and 1.0 wt %) with the sol–gel method and thermal treatment at different temperatures (120, 235, 400, 600 and 800 °C). Thereafter, the nanoceria powders were added to the polymer matrix by single screw extrusion. The absorption in the UV region was increased with the crystallite size of the CeO2 nanoparticles and the PMMA/CeO2 weight ratio. Due to the crystallinity of CeO2 nanoparticles, the thermal, mechanical and UV-shielding properties of the PMMA matrix were improved. The presence of CeO2 nanostructures exerts an influence on the mobility of PMMA chain segments, leading to a different glass transition temperature.

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Section: Introductionmentioning

confidence: 99%

Thermal, Mechanical and UV-Shielding Properties of Poly(Methyl Methacrylate)/Cerium Dioxide Hybrid Systems Obtained by Melt Compounding

et al. 2015

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“…Nanocrystalline ceria (CeO 2 ) has attracted much attention due to its fascinating mechanical and physic-chemical properties, as well as wide applications in various fields, including polishing materials [1, 2], automobile exhaust catalysts [3–5], fuel cell materials [6, 7], gas sensors [8, 9], high temperature superconducting materials [10], ultraviolet ray detectors, etc. [11, 12].…”

Section: Introductionmentioning

confidence: 99%

Room-Temperature Magnetism of Ceria Nanocubes by Inductively Transferring Electrons to Ce Atoms from Nearby Oxygen Vacancy

Kang

Guo

et al. 2015

Nano-Micro Lett.

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Ceria (CeO2) nanocubes were synthesized by a hydrothermal method and weak ferromagnetism was observed in room temperature. After ultraviolet irradiation, the saturation magnetization was significantly enhanced from ~3.18 × 10−3 to ~1.89 × 10−2 emu g−1. This is due to the increase of oxygen vacancies in CeO2 structure which was confirmed by X-ray photoelectron spectra. The first-principle calculation with Vienna ab-initio simulation package was used to illustrate the enhanced ferromagnetism mechanism after calculating the density of states (DOSs) and partial density of states (PDOSs) of CeO2 without and with different oxygen vacancies. It was found that the increase of oxygen vacancies will enlarge the PDOSs of Ce 4f orbital and DOSs. Two electrons in one oxygen vacancy are respectively excited to 4f orbital of two Ce atoms neighboring the vacancy, making these electron spin directions on 4f orbitals of these two Ce atoms parallel. This superexchange interaction leads to the formation of ferromagnetism in CeO2 at room temperature. Our work indicates that ultraviolet irradiation is an effective method to enhance the magnetism of CeO2 nanocube, and the first-principle calculation can understand well the enhanced magnetism.

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“…The thermostat layers were kept at a constant temperature of 300 K to mimic the heat dissipation in real wear process, while the remaining layers were freely moved according the Newton motion law. In the CMP process, ceria particles are usually used as abrasive particles with higher hardness when compared to monocrystalline silicon [30], which can be treated as rigid particles. In this work, the rigid diamond particles were modeled to facilitate the simulation process.…”

Section: Simulation Model and Methodologymentioning

confidence: 99%

“…In the CMP process, ceria particles are usually used as abrasive particles with higher hardness when compared to monocrystalline silicon [30], which can be treated as rigid particles. In this work, the rigid diamond particles were modeled to facilitate the simulation process.…”

Section: Simulation Model and Methodologymentioning

confidence: 99%

Influence of Abrasive Shape on the Abrasion and Phase Transformation of Monocrystalline Silicon

et al. 2018

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Abstract:The effect of abrasive shape on the three-body abrasion behaviors of monocrystalline silicon was investigated via molecular dynamics. The axial ratio of abrasive particle varied from 1.00 to 0.40 to mimic abrasive shape. It has been observed that the particle's movement became sliding instead of rolling when the axial ratio was smaller than a critical value 0.46. In the abrasion process, the friction force and normal force showed an approximately sinusoid-like fluctuation for the rolling ellipsoidal particles, while the front cutting of particle caused that friction force increased and became larger than normal force for sliding particles. The phase transformation process was tracked under different particle' movement patterns. The Si-II and Bct5 phase producing in loading process can partially transform to Si-III/Si-XII phase, and backtrack to original crystal silicon under pressure release, which also occurred in the abrasion process. The secondary phase transformation showed difference for particles' rolling and sliding movements after three-body abrasion. The rolling of particle induced the periodical and inhomogeneous deformation of substrates, while the sliding benefited producing high-quality surface in chemical mechanical polishing (CMP) process. This study aimed to construct a more precise model to understand the wear mechanism benefits evaluating the micro-electro-mechanical systems (MEMS) wear and CMP process of crystal materials.

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Polymethylmethacrylate (PMMA)/CeO 2 hybrid particles for enhanced chemical mechanical polishing performance

Cited by 73 publications

References 30 publications

Thermal, Mechanical and UV-Shielding Properties of Poly(Methyl Methacrylate)/Cerium Dioxide Hybrid Systems Obtained by Melt Compounding

Thermal, Mechanical and UV-Shielding Properties of Poly(Methyl Methacrylate)/Cerium Dioxide Hybrid Systems Obtained by Melt Compounding

Room-Temperature Magnetism of Ceria Nanocubes by Inductively Transferring Electrons to Ce Atoms from Nearby Oxygen Vacancy

Influence of Abrasive Shape on the Abrasion and Phase Transformation of Monocrystalline Silicon

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