Polymeric optical MEMS

Hossfeld, Jens; Paatzsch, Thomas; Schulze, Jens; Neumeier, Michel; Weber, Lutz; Bauer, Hans-Dieter; Ehrfeld, W.

doi:10.1117/12.341256

Cited by 11 publications

(7 citation statements)

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“…3 Hot embossing and injection molding have been used to create micro-optics. 4,5,6,7 Molding uses heat to soften the polymer and pressure to form a pattern from a micro-patterned negative mold. In addition, direct printing of liquid polymers to form micro-optic lenses, waveguides, and gratings has been accomplished by nano-imprinting 8 , and by techniques based on inkjet or liquid jet printing.…”

Section: Review Of Polymer Micro-opticsmentioning

confidence: 99%

Optical MEMS and polymers: an overview (Invited Paper)

Patterson

2005

SPIE Proceedings

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Polymer materials offer unique properties for fabrication of micro-optical systems. The ability to engineer the optical and mechanical properties of polymers, the low cost of polymers, and the wide choice of fabrication methods make polymers particularly attractive for low cost, and potential mass production of micro-optical elements and integrated micro-optical systems. An overview of the current state of the art in polymer micro-optic fabrication technology and applications to optical MEMS is presented.

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Section: Review Of Polymer Micro-opticsmentioning

confidence: 99%

Optical MEMS and polymers: an overview (Invited Paper)

Patterson

2005

SPIE Proceedings

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“…To address the assembly and the positioning of optical fibre ribbons (2 to 12 glass fibres), planar optical test structures using polymer are realised [7]. Figure 1 shows the layout of the planar optical test structure: a silicon or borosilicate glass rectangle die (20 mm x 10 mm).…”

Section: Design and Realisation Of Optical Structuresmentioning

confidence: 99%

Assembly of optical fibers for the connection of polymer-based waveguide

et al. 2003

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This paper describes the realisation of polymer-based optical structures and the assembly and packaging strategy to connect optical fibre ribbons to the waveguides. For that a low cost fabrication process using the SU-8™ thick photo-resist is presented. This process consists in the deposition of two photo-structurized resist layers filled up with epoxy glue realising the core waveguide. For the assembly, a new modular vacuum gripper was realised and installed on an automatic pick & place assembly robot to mount precisely and efficiently the optical fibres in the optical structures. First results have shown acceptable optical propagation loss for the complete test structure.

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“…In opposite to the other material classes like semiconductors, metals, or ceramics microcomponents made from plastic material can be easily fabricated using the different micromolding techniques which have been developed further for the last 5 years [1][2][3][4][5]. The commercial breakthrough strongly depends on low cost mass fabrication, which is directly determined by the dimensions of the molded microstructures as well as by the desired physical properties of the used polymers.…”

Section: Introductionmentioning

confidence: 99%

“…Plastic optical fibers (POF) are under investigation for short distance communication in computer systems, cable connectors, N x N coupling elements and optical switches are available on a laboratory scale [1,2].…”

Section: Introductionmentioning

confidence: 99%

<title>Micromolding of polymer waveguides</title>

Hanemann

Ulrich

Ruprecht

et al. 1999

Organic Photorefractives, Photoreceptors, Waveguides, and Fibers

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In microsystem technology the fabrication of either passive or active micro optical components made from polymers becomes more and more evident with respect to the intense expanding application possibilities e.g. in telecommunication.Actually the LIGA process developed at the Forschungszentrum Karisruhe (FZK), Germany, (LIGA is the german abbreviation of lithography with synchroiron radiation, electroplating and molding) allows the direct fabrication of microcomponents with lateral dimensions in the micrometer range, structural details in the submicrometer range, high aspect ratios ofup to several hundreds and a fmal average surface roughness ofless than 50 nm in small up to large scales. The molding ofpolymer components for microoptical applications, especially in the singlemode range, is determined by the achievable maximum accuracy of the molding technique itself and of the acceptable tolerances for low damping and coupling losses. Following the LIGA and related techniques e.g. mechanical microengmeering we want to present in this work the fabrication ofpolymer singlemode waveguides using a combination ofmicromolding and light-curing steps.

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Polymeric optical MEMS

Cited by 11 publications

References 0 publications

Optical MEMS and polymers: an overview (Invited Paper)

Optical MEMS and polymers: an overview (Invited Paper)

Assembly of optical fibers for the connection of polymer-based waveguide

<title>Micromolding of polymer waveguides</title>

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