Abstract:The scientific field of "Adaptronics" combines sensor and actuator effects with electronics. The components furnished with adaptronics shall sense relevant properties and shall adapt in an intelligent way-they shall "feel, think and act". For instance, one application is the active vibration compensation of dynamically stressed structures. The scope of the work to be presented is to manufacture sensor/actuator microsystems with a low stiffness and thickness in order to sustain the favourable properties of the … Show more
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