“…It has actual and potential applications in micromechanics, metallurgy, integrated optics, electronics, optoelectronics, sensor technology and chemical engineering (Fourrier et al, 2001;Hashioka and Matsumura, 2000;Ihlemann and Rubahn, 2000;Zheng, 2006). Most of the current laser-induced manufacturing technologies, such as ultraviolet lithography, femtosecond laser processing and excimer laser fabrication (Bauer et al, 2000;Hector and Mangat, 2001;Korte et al, 2004;Lim et al, 2006;Solak et al, 1999), are based on the ablation or etching effects of substrate material caused by the high power density of the focused laser beam. These technologies have strict requirements for laser sources, including laser power, wavelength and beam quality, and may include complicated steps, like coating, masking and bonding.…”