2002
DOI: 10.1007/s00542-002-0106-9
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Polymer microfabrication technologies

Abstract: The need for low-cost microfabrication technologies in modern life-sciences is described. The article compares the replication technologies, hot embossing and micro-injection moulding and gives an overview over the technologies used for fabrication of the replication masters. The back-end processes transforming the replicated plastic part into a complete microsystem are described. Some manufacturing issues of mass production are discussed.

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Cited by 163 publications
(103 citation statements)
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References 4 publications
(5 reference statements)
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“…The advantages are the short cycle time of production. The disadvantage is mainly the high cost of manufacturing [107].…”
Section: Laser Ablation Micromachiningmentioning
confidence: 99%
“…The advantages are the short cycle time of production. The disadvantage is mainly the high cost of manufacturing [107].…”
Section: Laser Ablation Micromachiningmentioning
confidence: 99%
“…The polymeric melt tends to flow more easily into cavities with relatively low resistance areas of greater cross section while the flow stagnates at the entrance of micro-structures; the result is that the melt freezes in this area because the filling time of the substrate is usually greater than the freezing time of the micro feature. It was recommended in the literature that injection moulded parts with HAR microstructures should have a thickness in which a quick filling of the substrate can allow for filling of the micro-cavities before solidification starts [7]. In addition the literature shows that, in unidirectional flow, the depth of filling in micro channels is sensitive to the channel width [8].…”
Section: Wwwintechopencommentioning
confidence: 99%
“…The choice of the technique for the insert fabrication generally depends on three main factors: insert material used, surface finishing (roughness) and the aspect ratio demanded by the application. A number of techniques currently in use for microfabrication include: LIGA-process; silicon etching; laser ablation, micro electrical discharge machining (μEDM) and mechanical micro machining (diamond turning, micro milling) (Rötting et al, 2002).…”
Section: Mould Insert Fabricationmentioning
confidence: 99%