Abstract:In this paper, we present latest results of a thermopneumatic microactuator based on polymer membrane and silicon technology. This device has application in distributed air-jet planar micromanipulation to levitate and convey small objects by changing air-flow direction on the surface. Our technology, combining deformable polymer membrane and movable silicon nozzle fabrication, offers many advantages compared to classic silicon technology, e.g. pneumatic microactuator array device. Those advantages are as follo… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.