Polymer gratings achieved by focused ion beam

Aubry, Cyril; Trigaud, Thierry; Moliton, Jean-Pierre; Chiron, D.

doi:10.1016/s0379-6779(01)00644-0

Cited by 23 publications

(15 citation statements)

References 6 publications

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“…Secondary Ion Mass Spectrometry (SIMS) studies revealed that hydrogen is expelled in large quantity and is the first molecular fragment driven out from the sample surface. [2] According to the literature, [10] the C-C bonds in the backbone as well as the C-C and the C-O bonds in the methacrylate side group are susceptible to cleavage by ions. Bond cleavage in the side groups produces small mobile fragments while broken bonds in the backbone chain will result in large immobile sections of the macromolecule with some trend to recombination of the radical states, at least at low Ga + ion currents.…”

Section: Resultsmentioning

confidence: 99%

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Focused ion beam irradiation—morphological and chemical evolution in PMMA

Kochumalayil

Meiser

Soldera

et al. 2009

Surface & Interface Analysis

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For poly(methyl methacrylate) (PMMA) as a representative of amorphous thermoplastic polymers, the milling effects, and the chemical changes due to ion bombardment with a focused ion beam (FIB) at normal incidence are studied with scanning force microscopy (SFM), scanning electron microscopy (SEM)/energy dispersive X-ray (EDX), and infrared (IR) spectroscopy for varying conditions of Ga + treatment, including the effect of partial water pressure. Stopping and Range of Ions in Matter (SRIM) simulation results for 30 keV Ga + at normal incidence show that the zone of primary ion-polymer interaction extends ca 100 nm into the PMMA. Accordingly, this interaction region is much wider than the original beam diameter. The width of the region where the recoiled ions interact strongly with the polymer chains is larger. Secondary processes, such as fragment diffusion and phonon transport, are expected to extend even farther into the polymer. SEM and SFM reveal distinct topologies of areas milled without or in presence of water vapour. Water vapour-assisted FIB milling produces more roughness and defects. The infrared attenuated total reflection spectroscopy (IR-ATR) spectra indicate that ion milling in PMMA damages methacrylate side groups in particular. In contrary to metals, an increase in the degree of milling is found when the beam spot overlap parameter increases.

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Section: Resultsmentioning

confidence: 99%

“…[2,3] For example, some of the underlying mechanisms may vary significantly for high and low ion beam irradiation. It has also been reported that the introduction of water vapour to the surface of polymer samples during FIB milling provides a significant increase in the milling yield of polymers.…”

Section: Introductionmentioning

confidence: 99%

Focused ion beam irradiation—morphological and chemical evolution in PMMA

Kochumalayil

Meiser

Soldera

et al. 2009

Surface & Interface Analysis

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“…Cho et al [169] employed ion assisted reactions (IAR) to modify the surface of polymeric materials to manipulate the wettability characteristics, enhancing their hydrophilic nature. In addition, Aubry et al [170], used a focused ion beam (FIB) to generate surface topographies that had a high enough resolution for applications in diffractive optical elements (DOEs). Furthermore, through the application of FIB, it has been shown that ripple patterns can be formed on polymeric materials (see Figure 9), a surface similar to that seen with the application of femtosecond laser processing (see Figure 4).…”

Section: Ion Beam and Electron Beam Processingmentioning

confidence: 99%

Surface Treatments to Modulate Bioadhesion: A Critical Review

Waugh¹,

Toccaceli²,

Gillett³

et al. 2016

rev adhes adhesives

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On account of the recent increase in importance of biological and microbiological adhesion in industries such as healthcare and food manufacturing many researchers are now turning to the study of materials, wettability and adhesion to develop the technology within these industries further. This is highly significant as the stem cell industry alone, for example, is currently worth £3.5 million in the United Kingdom (UK) alone. This paper reviews the current state-of-the-art techniques used for surface treatment with regards to modulating biological adhesion including laser surface treatment, plasma treatment, micro/nano printing and lithography, specifically highlighting areas of interest for further consideration by the scientific community. What is more, this review discusses the advantages and disadvantages of the current techniques enabling the assessment of the most attractive means for modulating biological adhesion, taking in to account cost effectiveness, complexity of equipment and capabilities for processing and analysis.

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“…Poly(methylmethacrylate), PMMA, a well-known electron beam resist, 18 is interesting in this regard due to its unusually high ion-beam sputtering yield, allowing facile creation of polymer gratings, 19 masters for high-resolution elastomer molding, 20 and patterned resists for anodic alumina etching. 21 Our interest in controlling molecular transport within submicrometer-sized structures led us to pursue FIB milling through thin films of PMMA as a route to the fabrication of individual submicrometer channels, because they exhibit large aspect ratios and the fabrication control necessary to create spatially defined arrays of submicrometer channels.…”

Section: Fabrication Of Single Nanofluidic Channels In Poly(methylmetmentioning

confidence: 99%

Fabrication of single nanofluidic channels in poly(methylmethacrylate) films via focused-ion beam milling for use as molecular gates

Cannon

Flachsbart

Shannon

et al. 2004

Applied Physics Letters

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Focused-ion beam (FIB) milling provides rapid fabrication of individual cylindrical submicrometer channels with reproducible dimensions (±5% diameters) through 8-μm thick poly(methylmethacrylate) (PMMA) films. PMMA films are spincast on sacrificial Si carriers and sputter-coated with Au before the 30-kV gallium FIB milling process. By adding a trace amount of poly(ethyleneoxide) and poly(dimethylsiloxane) to the PMMA solution before casting, the films can be released for subsequent mounting in microfluidic devices to create hybrid microfluidic-nanofluidic multilevel architectures. In situ FIB sectioning demonstrates the smooth cylindrical surface within the pore. Placing a milled film in contact with an aqueous fluorescein solution fills the channel by capillary action, as verified by confocal fluorescence microscopy. Confocal fluorescence of dyed films reveals that the pores span the thickness of the PMMA film. Small arrays of channels with a defined number and density and arbitrary in-plane spatial arrangement are fabricated with this process, allowing a unique testbed for high aspect ratio nanofluidic devices.

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Polymer gratings achieved by focused ion beam

Cited by 23 publications

References 6 publications

Focused ion beam irradiation—morphological and chemical evolution in PMMA

Focused ion beam irradiation—morphological and chemical evolution in PMMA

Surface Treatments to Modulate Bioadhesion: A Critical Review

Fabrication of single nanofluidic channels in poly(methylmethacrylate) films via focused-ion beam milling for use as molecular gates

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