Abstract:CMOS-compatible Si3N4 waveguide offers the advantage of compact size, low cost, and integrate-ability in optical fiber sensing network. To develop a Si3N4 waveguide chip for the sensing of toxic and carcinogenic pyridine vapor, this work demonstrated the following two aspects in waveguide engineering. The first effort was waveguide material engineering: the functionalization of Si3N4 waveguide by simple spin-coating a sensitive and specific porous dipolar polymer for pyridine detection. The other effort was th… Show more
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