Polymer‐Derived Ceramic Coatings with Excellent Thermal Cycling Stability
Jan Bernauer,
Samuel Aeneas Kredel,
Emanuel Ionescu
et al.
Abstract:In the present work, transition metal‐containing preceramic silicon polymers were synthesized via chemical modification of a commercially available organopolysilazane with Hf and Ta amido complexes as well as with borane dimethyl sulfide complex. The incorporation of transition metals into the polymer structure, their influence on ceramization and processability were thoroughly investigated. Moreover, the prepared preceramics were coated onto silicon wafers via spin coating and converted into crack‐free, amorp… Show more
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