Polymer bonding of micro-machined silicon structures

Besten, C. den; Hal, R.E.G. van; Muñoz, José Santiago Álvarez; Bergveld, Piet

doi:10.1109/memsys.1992.187699

Cited by 45 publications

(15 citation statements)

References 10 publications

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“…[72] Second, the precursor should be mixed with polymer-matrix like polyimide and epoxy (PCBS) such as tetraethylorthosilicate (TEOS). [73] The process was also applied to TiO 2 /polymer nanocomposites preparation.…”

Section: Sol-gel Processmentioning

confidence: 99%

Effect of nanotoxicity and enhancement in performance of polymer composites using nanofillers: A state‐of‐the‐art review

et al. 2021

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Polymer composite materials are consistently being used in various industrial and domestic applications due to their lightweight, high-specific strength, and low cost. In order to enhance various performance of polymer composites, a suitable nanofiller can be used. Polymer composites, which take advantage of natural fibers and nanofillers, synergistically, contribute to improved properties and environmental condition by making them suitable for various applications (aerospace, automobile industries, electronics, biomedical, etc.). The present study gives an insight of nanofiller-based polymer composite and the challenges associated with processing methods. The use of nanofillers in polymer composites to enhance their mechanical properties (tensile, flexural, impact, and tribological) and most importantly the self-healing property due to which they are finding numerous applications. This study also includes the problems associated with excessive use of nanomaterial leading to various environmental and health hazards. The problems and their remedies associated with nano-toxicity have also been addressed.

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Section: Sol-gel Processmentioning

confidence: 99%

Effect of nanotoxicity and enhancement in performance of polymer composites using nanofillers: A state‐of‐the‐art review

et al. 2021

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“…As the intermediate layer, for example, another glass [17], boron oxide [18], sodium silicate [19] and polymer thin films [20] can be used. These processes all have their own disadvantages such as elevated process temperatures, flat surfaces that are required or they form a weak bond.…”

Section: Interface Between Cooler and Image Sensormentioning

confidence: 99%

Interfacing Issues in Microcooling of Optical Detectors in Space Applications

Derking¹,

Brake²,

Linder³

et al. 2010

AIP Conference Proceedings

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Miniature Joule-Thomson coolers were developed at the University of Twente and are able to cool to 100 K with a typical cooling power of 10 to 20 mW. These coolers have a high potential for space applications in cooling small optical detectors for future earth observation and science missions. Under contract of the European Space Agency, we investigate on-chip detector cooling for the temperature range 70 K -250 K.To identify the detectors that can be cooled by a JT microcooler, a literature survey was performed. Following this survey, we selected a micro digital CMOS image sensor. A conceptual design of this cooler-sensor system is made. Among various techniques, indium soldering and silver paint are chosen for the bonding of the silicon sensor to the glass microcooler. Electrical connections from the sensor to the outside will be realized by structuring them in a thin layer of gold that is sputtered on the outside of the cooler to minimize the radiative heat load. For the electrical connections between the sensor and the structured leads, aluminum or gold bond wires will be used.

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“…Nowadays, the use of pieces with reduced dimensions has increased in several commercial sectors, especially in electronic and medicine fields. Some examples of these devices are microchips, nanoneedles or pumps for microfluidics [1][2][3]. The wide range of applications and the high resolution 2 of 17 required for the final performance have enhanced the interest towards the use of polymers for these purposes due to their versatility.…”

Section: Introductionmentioning

confidence: 99%

Preparation of Medicated Polylactide Micropieces by Means of Ultrasonic Technology

et al. 2019

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A technology based on the application of ultrasound as an energy source was applied to get polylactide (PLA) micropieces with minimum degradation and processing time. This requirement could be even shorter than 1.5 s. The ultrasound technology was also demonstrated to be efficient for the incorporation of drugs with a pharmacological activity. Thus, the loading of two representative bactericide agents (i.e., triclosan (TCS), and chlorhexidine (CHX)), having differentiated chemical properties was evaluated. Typical physicochemical characterization included mechanical and thermal properties together with the evaluation of molecular degradation during processing for both unloaded and loaded specimens. Results pointed out that the thermally stable TCS could be loaded into the specimens without any problem, but cautions should be taken into account for CHX. Nevertheless, degradation could in this case be avoided when the drug load was lower than 3 wt-%, a result that contrasts with the significant decomposition attained by using conventional melting processes, which required long processing times at high temperatures. Morphologic analyses of loaded specimens did not reveal significant defects, while spectroscopic analyses showed that a good dispersion of drugs inside pieces could be attained. Drugs were slowly released from micropieces with a rate that was dependent on their hydrophilic character. Thus, release in a phosphate buffered saline (PBS)-ethanol medium (70% of PBS) followed a first order kinetics with constants of 0.0356 h−1 and 0.027 h−1 for CHX and TCS, respectively. A clear bactericide effect against both Gram-positive and Gram-negative bacteria was achieved at the beginning of exposure to the corresponding culture media, while a bacteriostatic effect was interestingly still detected after long exposure times. In fact, bacterial growth could be reduced to near 20% when micropieces were loaded with only 3 wt-% of any of the selected CHX and TCS drugs.

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Polymer bonding of micro-machined silicon structures

Cited by 45 publications

References 10 publications

Effect of nanotoxicity and enhancement in performance of polymer composites using nanofillers: A state‐of‐the‐art review

Effect of nanotoxicity and enhancement in performance of polymer composites using nanofillers: A state‐of‐the‐art review

Interfacing Issues in Microcooling of Optical Detectors in Space Applications

Preparation of Medicated Polylactide Micropieces by Means of Ultrasonic Technology

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