Polyimide-Enhanced Stretchable Interconnects: Design, Fabrication, and Characterization

Hsu, Yu‐I; González, Mario; Bossuyt, Frederick; Vanfleteren, Jan; Wolf, Ingrid De

doi:10.1109/ted.2011.2147789

Cited by 93 publications

(61 citation statements)

References 12 publications

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“…Used inversely, the capacitor works as a charge pump that generates electrical energy. copper conductors 35 (see the article by Vanfl eteren et al in this issue) in a design similar to that of rigid-fl ex circuits, where circuit boards are connected by fl at cables. 36 When the whole system is stretched, the substrate, devices, interconnects, and protective encapsulating layers interact.…”

Section: The Architecture Of Stretchable Electronicsmentioning

confidence: 99%

Materials for stretchable electronics

2012

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Section: The Architecture Of Stretchable Electronicsmentioning

confidence: 99%

Materials for stretchable electronics

2012

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“…The crack propagation can be delayed by introducing a polymer material with a higher Young's modulus than PDMS, as a support for the horseshoe-shaped conductors. Furthermore, increasing the width of the support can effectively reduce the plastic strain in the metal conductor [18], again postponing the formation of cracks.…”

Section: Stretchable Electronics Conceptmentioning

confidence: 99%

Thin-film stretchable electronics technology based on meandering interconnections: fabrication and mechanical performance

Verplancke¹,

Bossuyt²,

Cuypers³

et al. 2011

J. Micromech. Microeng.

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A new fabrication technology for stretchable electrical interconnections is presented. This technology can be used to connect various non-stretchable polyimide islands hosting conventional electronic components. The interconnections are realized by patterning a 200 nm thick sputter-deposited gold film into meandering horseshoe shapes, functioning as 'two-dimensional springs' when embedded in a silicone elastomer. Polyimide support is introduced around the meandering conductors as a means to improve the mechanical performance. Processing is done on a temporary carrier; the islands and interconnections are embedded in polydimethylsiloxane in a final stage. To this end, a release technique compatible with high temperatures up to 350• C based on the evaporation of a 400 nm thick layer of potassium chloride is developed. Test structures consisting of stretchable interconnections with a varying polyimide support width were fabricated. These were strained up to twice their original length without compromising their functionality. Also cyclic mechanical loading at various strains was performed, indicating the influence of the polyimide support width on the lifetime. At strains of 10%, a minimum lifetime of 500 000 cycles is demonstrated. The presented technology thus provides a promising route towards the fabrication of stretchable electronic circuits with enhanced reliability.

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“…For example, a filamentary serpentine network of gold with vanishing rigid islands has enabled mechanically invisible electronic tattoos to be intimately integrated with human skin for non-invasive electrophysiological, thermal, and hydration sensing [14][15][16][17], as well as wearable soft antenna for wireless communication [18]. The mechanics of metallic serpentines has also been studied extensively through both experimental [8,[19][20][21] and theoretical/numerical means [22][23][24][25][26].…”

Section: Introductionmentioning

confidence: 99%

Indium Tin Oxide (ITO) serpentine ribbons on soft substrates stretched beyond 100%

Yang

2015

Extreme Mechanics Letters

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Polyimide-Enhanced Stretchable Interconnects: Design, Fabrication, and Characterization

Cited by 93 publications

References 12 publications

Materials for stretchable electronics

Materials for stretchable electronics

Thin-film stretchable electronics technology based on meandering interconnections: fabrication and mechanical performance

Indium Tin Oxide (ITO) serpentine ribbons on soft substrates stretched beyond 100%

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