Introduction to Thin Film Transistors 2013
DOI: 10.1007/978-3-319-00002-2_8
|View full text |Cite
|
Sign up to set email alerts
|

Poly-Si TFT Performance

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4

Citation Types

0
4
0

Year Published

2017
2017
2017
2017

Publication Types

Select...
1

Relationship

0
1

Authors

Journals

citations
Cited by 1 publication
(4 citation statements)
references
References 66 publications
0
4
0
Order By: Relevance
“…This fact again is a consequence of the poly-Si roughness at source and drain areas and of not fully optimized implantation-induced defects recovery by laser annealing. 15 On the other hand, the saturation region curve is not flat as expected. This nonideal trend is caused by two effects.…”
Section: Resultsmentioning
confidence: 60%
See 3 more Smart Citations
“…This fact again is a consequence of the poly-Si roughness at source and drain areas and of not fully optimized implantation-induced defects recovery by laser annealing. 15 On the other hand, the saturation region curve is not flat as expected. This nonideal trend is caused by two effects.…”
Section: Resultsmentioning
confidence: 60%
“…Furthermore, the triode region in the output curves is not perfectly linear because of not ideal contact resistance at source and drain contacts. This fact again is a consequence of the poly-Si roughness at source and drain areas and of not fully optimized implantation-induced defects recovery by laser annealing . On the other hand, the saturation region curve is not flat as expected.…”
Section: Resultsmentioning
confidence: 79%
See 2 more Smart Citations