“…In this study, the role of ethanolamine and ammonium fluoride has been evaluated in the dissolution of copper oxide from the Cu interconnection process. Because ethanolamine has the useful property of forming a chelate with copper ions and readily dissolving into water, the component can be exploited to remove metal oxide layers through the formation of Cu(MEA) 4 2+ , Cu(DEA) 3 2+ and Cu(TEA) 2 2+ complexes at the high pH values 10–12. Aqueous solutions with different pH values, containing ethanolamine, ammonium fluoride, or both, were prepared to evaluate their dissolution properties for copper oxide.…”