2017
DOI: 10.1063/1.4999219
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Polarization dependent nanostructuring of silicon with femtosecond vortex pulse

Abstract: We fabricated conical nanostructures on silicon with a tip dimension of ∼ 70 nm using a single twisted femtosecond light pulse carrying orbital angular momentum (ℓ=±1). The height of the nano-cone, encircled by a smooth rim, increased from ∼ 350 nm to ∼ 1 μm with the pulse energy and number of pulses, whereas the apex angle remained constant. The nano-cone height was independent of the helicity of the twisted light; however, it is reduced for linear polarization compared to circular at higher pulse energies. F… Show more

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Cited by 39 publications
(21 citation statements)
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“…The use of ultrafast (picosecond–femtosecond) lasers for irradiation may minimize optothermal effects and collateral damage of the material surfaces. For instance, Rahimian et al created cone‐shaped nanostructures with a twist and an extremely smooth circular rim (without any debris arising from laser‐induced thermal effects) on a silicon substrate by the deposition of a single femtosecond OAM pulse with zero‐TAM, i.e., ℓ = ±1 and s = ∓1 ( Figure ) . The fabricated nanostructures exhibited a tip curvature of ≈70 nm, and a height of 350–1000 nm.…”
Section: Helical Structuresmentioning
confidence: 99%
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“…The use of ultrafast (picosecond–femtosecond) lasers for irradiation may minimize optothermal effects and collateral damage of the material surfaces. For instance, Rahimian et al created cone‐shaped nanostructures with a twist and an extremely smooth circular rim (without any debris arising from laser‐induced thermal effects) on a silicon substrate by the deposition of a single femtosecond OAM pulse with zero‐TAM, i.e., ℓ = ±1 and s = ∓1 ( Figure ) . The fabricated nanostructures exhibited a tip curvature of ≈70 nm, and a height of 350–1000 nm.…”
Section: Helical Structuresmentioning
confidence: 99%
“…a,b) SEM and c,d) AFM images of nanostructures created on p‐type silicon by irradiation with a femtosecond vortex laser pulse (ℓ = −1, s = +1) with pulse energies of (a,c) 150 nJ and (b,d) 310 nJ. Reproduced with permission . Copyright 2017, American Institute of Physics.…”
Section: Helical Structuresmentioning
confidence: 99%
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“…The optical vortex has been widely applied in a variety of fields, such as optical trapping and manipulation [6][7][8][9][10][11][12], optical metrology [13][14][15], fiber-based or free-space optical communication [16][17][18][19][20][21][22][23][24], quantum computing [25][26][27], cold atom physics [28][29][30][31][32], astrophysics [33][34][35], and material processing [36,37]. Furthermore, an optical vortex enables the twisting of a variety of materials, such as metals [38][39][40][41], semiconductors [42,43], azopolymers [44][45][46], and even liquid-resin to shape helical nano/microscale structures. Such helical structures are expected to offer new research avenues, for example, chiral selective imaging systems (e.g., atomic force microscopes [47]), optoelectro-mechanical systems, and plasmon-enhanced chiral metamaterials.…”
Section: Introductionmentioning
confidence: 99%
“…For example, optical vortex beams with nanosecond pulse duration have been exploited to fabricate chiral micro-needles on various materials (e.g. metals, silicon and azo-polymer) 7 , 8 , while a variety of structures have been achieved with fs pulses (e.g., silicon nano-cones 9 , polymer micro-tubes 10 , graphene micro- and nano-disks 11 , nano-cavities in glasses 12 , etc.). An amazing property of fs laser pulses is the ability to trigger the formation of self-organized quasi-periodic surface patterns, generally indicated as laser-induced periodic surface structures (LIPSS) 13 15 .…”
Section: Introductionmentioning
confidence: 99%