2020
DOI: 10.1103/physrevmaterials.4.104602
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Point and extended defects in heteroepitaxial βGa2O3 films

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Cited by 13 publications
(11 citation statements)
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“…The distinct defect distribution between the interface region and the top film provides valuable insights into understanding the dramatic enhancement of responsivity with faster response time occurring at a thickness far larger than d p . It is well established that material defects, in the form of lattice disorders and surface defects, widely exist for films grown on heterogeneous substrates. , This is particularly true for the film growth with large lattice mismatch, such as the case of ε-Ga 2 O 3 on sapphire in this study. The STEM image in Figure a identifies a disordered interface region with a high density of misfit dislocations and domain boundaries, in particular for the initial 100–150 nm region, which is consistent with the XPS observation.…”
Section: Resultsmentioning
confidence: 99%
“…The distinct defect distribution between the interface region and the top film provides valuable insights into understanding the dramatic enhancement of responsivity with faster response time occurring at a thickness far larger than d p . It is well established that material defects, in the form of lattice disorders and surface defects, widely exist for films grown on heterogeneous substrates. , This is particularly true for the film growth with large lattice mismatch, such as the case of ε-Ga 2 O 3 on sapphire in this study. The STEM image in Figure a identifies a disordered interface region with a high density of misfit dislocations and domain boundaries, in particular for the initial 100–150 nm region, which is consistent with the XPS observation.…”
Section: Resultsmentioning
confidence: 99%
“…Finally, the bandgap can also decrease due to the presence of defects, which is the prevalent hypothesis in the literature. For example, in ref , it is found that defects in thin undoped β-Ga 2 O 3 films lower the observed optical bandgap from 4.85 to 4.57 eV. Using deep-level transient spectroscopy, this study shows several deep level states, ∼0.5–0.7 eV, below the conduction band.…”
Section: Resultsmentioning
confidence: 51%
“…Experimental VEELS bandgap values (black dots) vs theoretical bandgap from assuming defect states at the interface that lower the bandgap to 4.57 eV as measured in ref , exponentially decaying into β-Ga 2 O 3 with a decay length of 7 nm (red dashed line), convoluted with 15 nm Lorentzian broadening (red solid line).…”
Section: Resultsmentioning
confidence: 95%
See 1 more Smart Citation
“…The goal of this article is to explain the basics of TL, inform the reader about its capability as a great tool for measuring the energy levels of donors and acceptors in semiconductors, and bring the attention to the development of cryogenic thermally stimulated photoemission spectroscopy (C-TSPS) [55] which extends TL or thermally stimulated emission measurements to cover the entire range of shallow and deep levels in bandgap materials. Examples on successful applications of TL for the characterization of deep and shallow donors and acceptors in semiconductors [56][57][58][59][60] are discussed in detail revealing how this technique can be a powerful tool in the study of the electrical transport properties of semiconductors. Finally, the potential applications of C-TSPS in new research areas such as corrosion, radiation damage, ion implantation, and defects in oxides and other bandgap materials are discussed.…”
Section: Introductionmentioning
confidence: 99%