2014
DOI: 10.1109/tuffc.2014.2999
|View full text |Cite
|
Sign up to set email alerts
|

PMN-PT single-crystal high-frequency kerfless phased array

Abstract: This paper reports the design, fabrication, and characterization of a miniature high-frequency kerfless phased array prepared from a PMN-PT single crystal for forward-looking intravascular or endoscopic imaging applications. After lapping down to around 40 μm, the PMN-PT material was utilized to fabricate 32-element kerfless phased arrays using micromachining techniques. The aperture size of the active area was only 1.0 × 1.0 mm. The measured results showed that the array had a center frequency of 40 MHz, a ba… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
23
0

Year Published

2015
2015
2022
2022

Publication Types

Select...
8
1

Relationship

2
7

Authors

Journals

citations
Cited by 38 publications
(23 citation statements)
references
References 38 publications
0
23
0
Order By: Relevance
“…[1][2][3][4][5][6] However, conventional manufacturing processes such as etching and dicing for piezoelectric ceramics fabrication have limited capability of achieving complex geometry and high resolution(X-Y resolution<25μm). Moreover, mechanical stress caused by the traditional machining processes can result in grain pullout, strength degradation and depolarization of the near surface region, which will led to significant degradation in piezoelectric device performance.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5][6] However, conventional manufacturing processes such as etching and dicing for piezoelectric ceramics fabrication have limited capability of achieving complex geometry and high resolution(X-Y resolution<25μm). Moreover, mechanical stress caused by the traditional machining processes can result in grain pullout, strength degradation and depolarization of the near surface region, which will led to significant degradation in piezoelectric device performance.…”
Section: Introductionmentioning
confidence: 99%
“…Considerable effort has been put into the development of multielement arrays, which do not need rotation. Miniaturized linear arrays that provide 2-D FL ultrasound images [16]- [18] can achieve volumetric imaging by mechanically scanning the transducer and combining different 2-D planes into a 3-D volume data set. This procedure is complex and easily affected by motion artifacts.…”
mentioning
confidence: 99%
“…The latter study envisioned a fully populated rectangular grid of CMUT transducers, and the inherent periodicity resulted in strong side-lobes and a high transducer complexity. At higher frequencies, such aperiodic arrays could be manufactured using a kerfless approach, where electrode patterning rather than mechanical separation is used to isolate elements 44, 45 . However, stronger mechanical cross-talk between neighbouring elements is typically observed for kerfless arrays than for conventional arrays 46 , resulting in a reduced image quality.…”
Section: Discussionmentioning
confidence: 99%