2014
DOI: 10.1016/j.electacta.2013.12.112
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Plating Uniformity of Bottom-up Copper Pillars and Patterns for IC Substrates with Additive-assisted Electrodeposition

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Cited by 85 publications
(32 citation statements)
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“…Electronic products with the demand of miniaturization, multifunction and portability pursue high density interconnection (HDI) of printed circuit boards (PCB) for transmitting electrical signals in high speed [1,2]. Copper electrodeposition has good agreement with HDI microvias metallization due to its void-free filling in the features, minimal topography of the final copper surface, and controllable impurity incorporation in the plated copper film [3][4][5].…”
mentioning
confidence: 95%
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“…Electronic products with the demand of miniaturization, multifunction and portability pursue high density interconnection (HDI) of printed circuit boards (PCB) for transmitting electrical signals in high speed [1,2]. Copper electrodeposition has good agreement with HDI microvias metallization due to its void-free filling in the features, minimal topography of the final copper surface, and controllable impurity incorporation in the plated copper film [3][4][5].…”
mentioning
confidence: 95%
“…However, impure chemicals in phosphorized copper, released during electroplating process could influence the structure of copper deposits [7]. In addition, the change of size, topography and specific surface area of phosphorized copper during dissolved process could induce unstable current density and uneven distribution of electric fluxline, thereby resulting in weak plating uniformity of copper deposits [2,8]. Alternatively, a novel plating system with insoluble anode is employed for copper electrodeposition with high performance, where copper oxide is dissolved for the complement of cupric ions.…”
mentioning
confidence: 99%
“…Copper electrodeposition of multilayer printed circuit boards (PCB) from an acidic plating bath is a widely used method for meeting the demands of manufacturing electronic products . One particular challenge in this context is the defect‐free and uniform through hole (TH) electroplating of multilayer PCB . In order to obtain a well surface morphology and crystallization copper layer, a pack of organic additives is an adopted method for the metallization of TH with low cost and easy control .…”
Section: Introductionmentioning
confidence: 99%
“…Printed circuit board (PCB) exhibits high density interconnection to realize high-speed signal transmission [1] . The reliability of PCB with gall grid array (BGA) soldering has become increasingly prominent since the popularity of all kinds of portable electronic products.…”
Section: Introductionmentioning
confidence: 99%