1987
DOI: 10.1109/tmag.1987.1065550
|View full text |Cite
|
Sign up to set email alerts
|

Plating of ferrite film on 8" disc at 70°C by "spray-spin-coating" method

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
10
0

Year Published

1989
1989
1997
1997

Publication Types

Select...
6
2

Relationship

1
7

Authors

Journals

citations
Cited by 29 publications
(10 citation statements)
references
References 4 publications
0
10
0
Order By: Relevance
“…First, Ni-Zn ferrite layers were deposited by Spin-Spray Ferrite Plating on glass substrates at 90 "C, using a reaction solution of FeClztNiClztZnClz and an oxidizing solution of NaN02tCH3COONH4 (pH = 5-7) [3]. Next, 100 nm thick Co-Cr-Ta layers were deposited at 200 "C in 0.7 mTorr of Ar using a facing targets sputtering apparatus.…”
Section: Methodsmentioning
confidence: 99%
“…First, Ni-Zn ferrite layers were deposited by Spin-Spray Ferrite Plating on glass substrates at 90 "C, using a reaction solution of FeClztNiClztZnClz and an oxidizing solution of NaN02tCH3COONH4 (pH = 5-7) [3]. Next, 100 nm thick Co-Cr-Ta layers were deposited at 200 "C in 0.7 mTorr of Ar using a facing targets sputtering apparatus.…”
Section: Methodsmentioning
confidence: 99%
“…A NaN0 2 solution was supplied to the solution to keep oxidation reduction potential (ORP) at -500 mY, and NH 4 0H solution to keep the pH value at 7.0. For comparison, we also performed the ferrite plating without sonication, agitating the aqueous solution with a spinning stirrer which was replaced for the ultrasound horn and the spin-spray ferrite-plating [4]. Fe304 films were deposited on polyacrylate spheres, 4 !…”
Section: Methodsmentioning
confidence: 99%
“…The reaction solution is prepared from FeCI2, CoCI2 , NiCI2, and ZnCl2 by dissolving them together with CHaCOONH4 (which works as a pH buffer and also a complexing agent) in distilled water [2]- [4], [6]. The pH value of the solution is adjusted to a desired value (5)(6)(7)(8) by adding NaOH or NHa solution.…”
Section: Preparation Of Aqueous Solutionmentioning
confidence: 99%
“…The deposition rate of film increases as the NaN02 concentration in the oxidizing solution increases. For good quality film of single phase spinel, we get maximum rate of 30 nm/min and 20 nm/min by the "thin liquidfilm" [3] and "spin-spray" method [4], respectively.…”
Section: Deposition Rate and Structure Of Filmmentioning
confidence: 99%
See 1 more Smart Citation