Plate-Mode Ultrasonic Oscillator Sensors

White, Richard M.; Wicher, P.J.; Wenzel, S.W.; Zellers, Edward T.

doi:10.1109/t-uffc.1987.26928

Cited by 130 publications

(41 citation statements)

References 14 publications

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“…The fragility of the thin plate and its consequent sensitivity to external pressure is particularly serious. Performance analyses as well as details regarding fabrication of the device can be found in the original paper [227].…”

Section: Fundamental Principles and Basic Types Of Transducersmentioning

confidence: 99%

“…On the other hand, SAWs are associated with a variety of circuitry problems resulting from the relatively high operating frequencies required for adequate sensor sensitivity. A modification of this type of wave was introduced by CHANG and WHITE [226], [227], who adapted a SAW sensor by creating an exceptionally thin membrane-like piezoelectric region in the substrate directly beneath the acoustic path. This in turn led to the production of Lamb waves, which proved to be particularly suitable for chemical sensor applications, opening the way to the socalled plate-mode oscillator, a device representing the present state of the art.…”

Section: Introductionmentioning

confidence: 99%

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Chemical and Biochemical Sensors

Cammann¹,

Roß²,

Katerkamp³

et al. 2001

Ullmann's Encyclopedia of Industrial Chemistry

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The article contains sections titled: 1. Introduction to the Field of Sensors and Actuators 2. Chemical Sensors 2.1. Introduction 2.2. Molecular Recognition Processes and Corresponding Selectivities 2.2.1. Catalytic Processes in Calorimetric Devices 2.2.2. Reactions at Semiconductor Surfaces and Interfaces Influencing Surface or Bulk Conductivities 2.2.3. Selective Ion Conductivities in Solid‐State Materials 2.2.4. Selective Adsorption ‐ Distribution and Supramolecular Chemistry at Interfaces 2.2.5. Selective Charge‐Transfer Processes at Ion‐Selective Electrodes (Potentiometry) 2.2.6. Selective Electrochemical Reactions at Working Electrodes (Voltammetry and Amperometry) 2.2.7. Molecular Recognition Processes Based on Molecular Biological Principles 2.3. Transducers for Molecular Recognition: Processes and Sensitivities 2.3.1. Electrochemical Sensors 2.3.1.1. Self‐Indicating Potentiometric Electrodes 2.3.1.2. Voltammetric and Amperometric Cells 2.3.1.3. Conductance Devices 2.3.1.4. Ion‐Selective Field‐Effect Transistors (ISFETs) 2.3.2. Optical Sensors 2.3.2.1. Fiber‐Optical Sensors 2.3.2.2. Integrated Optical Chemical and Biochemical Sensors 2.3.2.3. Surface Plasmon Resonance 2.3.2.4. Reflectometric Interference Spectroscopy 2.3.3. Mass‐Sensitive Devices 2.3.3.1. Introduction 2.3.3.2. Fundamental Principles and Basic Types of Transducers 2.3.3.3. Theoretical Background 2.3.3.4. Technical Considerations 2.3.3.5. Specific Applications 2.3.3.6. Conclusions and Outlook 2.3.4. Calorimetric Devices 2.4. Problems Associated with Chemical Sensors 2.5. Multisensor Arrays, Electronic Noses, and Tongues 3. Biochemical Sensors (Biosensors) 3.1. Definitions, General Construction, and Classification 3.2. Biocatalytic (Metabolic) Sensors 3.2.1. Monoenzyme Sensors 3.2.2. Multienzyme Sensors 3.2.3. Enzyme Sensors for Inhibitors ‐ Toxic Effect Sensors 3.2.4. Biosensors Utilizing Intact Biological Receptors 3.3. Affinity Sensors ‐ Immuno‐Probes 3.3.1. Direct‐Sensing Immuno‐Probes without Marker Molecules 3.3.2. Indirect‐Sensing Immuno‐Probes using Marker Molecules 3.4. Whole‐Cell Biosensors 3.5. Problems and Future Prospects 4. Actuators and Instrumentation 5. Future Trends and Outlook

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Section: Fundamental Principles and Basic Types Of Transducersmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Chemical and Biochemical Sensors

Cammann¹,

Roß²,

Katerkamp³

et al. 2001

Ullmann's Encyclopedia of Industrial Chemistry

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show abstract

“…7 This type of acoustic wave mode necessarily involves a system with dispersion so that the phase velocity is not equal to the group velocity. While some recognition of the difference between group and phase velocity exists in literature on acoustic plate mode sensors, [8][9][10] relatively little discussion of this has occurred in literature on Love wave sensors. 11,12 The main effect that has been accounted for is the inclusion of a factor, which is the ratio of the group to phase velocity, in the formula ⌬ f / f ϭ(v g /v)(⌬v/v͒ relating the fractional frequency shift to the fractional change in phase speed due to mass deposition.…”

Section: Introductionmentioning

confidence: 99%

Mass sensitivity of acoustic wave devices from group and phase velocity measurements

McHale

Martin

Newton

2002

Journal of Applied Physics

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The effect of dispersion on acoustic wave sensors is considered. The discussion is focused upon layer guided surface acoustic waves ͑Love waves͒, which obtain their high mass sensitivity for the first Love wave mode by optimizing the guiding layer thickness, d, such that dϳ l /4; the wavelength in the layer is given by l ϭ f /v l where f is the operating frequency and v l is the shear acoustic speed of the guiding layer. We show that this optimization of guiding layer thickness corresponds to strong dispersion so that the phase and group velocities can be quite different. From the definition of the phase velocity mass sensitivity, we show that it can be determined from either the slope of the curve of phase velocity with normalized guiding layer thickness, zϭd/ l , or from the phase and group velocities measured for a given guiding layer thickness. Experimental data for a poly͑methylmethacrylate͒ polymer guiding layer on 36°XY Lithium Tantalate is presented. Measurements of phase velocity and group velocity determined by a network analyzer were obtained for systematically increasing guiding layer thicknesses; a pulse transit experiment was also used to provide independent confirmation of the group velocity data. Two independent estimates of the mass sensitivity are obtained for zϭd/ l Ͻ0.22 from ͑i͒ the slope of the phase velocity curve and ͑ii͒ the measurements of the group and phase velocity. These two estimates are shown to be consistent and we, therefore, conclude that it is possible to determine the mass sensitivity for a Love wave device with a given guiding layer thickness from measurements of the phase and group velocities. Moreover, we argue that the formula using group velocity to determine phase velocity mass sensitivity can be extended to a wide range of other acoustic wave sensors. In addition, we suggest that variations in the group velocity due to deposited mass may be a more sensitive parameter than variations in the phase velocity.

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“…In that sense, an increasing interest in the development of integrated acoustic sensors has been demonstrated in recent decades. Most of them use either bulk (BAW) [I], surface (SAW) [2], plate (or Lamb) [3], or thin rod [4] acoustic waves.…”

Section: Introductionmentioning

confidence: 99%