Plastic microoptical interconnection modules for parallel free-space interand intra-MCM data communication

<title>Microlens arrays fabricated by deep lithography with protons and their characterization</title>

“…This DLP process consists of a proton irradiation of a PMMA-layer in well-defined regions, followed by a volume expansion of these bombarded zones caused by a diffusion of an organic monomer vapor. The uniqueness of this approach lies in the fact that this particular fabrication process of microlenses is fully compatible with the other process steps of the DLP technology [9] and therefore allows the monolithic integration of these microlenses with other plastic micro-optical components to form replicable and low-cost high precision micro-optical modules.…”

Ion microbeam diagnostics with scintillators for application of deep lithography with particles

“…After a selective chemical treatment (etching of the irradiated region or swelling by diffusion of monomer vapors), the needed microstructures are produced [1], [2]. Obviously, good quality microcomponents are obtained only if an accurate control of the deposited dose, in terms of integral value and spatial distribution, is carried out, otherwise distortion in the structures and unreproducibility can occur.…”

Integration strategies for micro-optical systems

“…In these techniques the optical interconnect is fabricated from a single material which is then used as a master for mass-production in a moldable polymer via injection molding. An example of this is described in reference [1] where an optical bridge which interconnects two 2 x 8 arrays of optical channels over a distance of 5 mm is presented (see figure 1(b)). The element is approximately 5 x 6 x 2 mm in size and is fabricated in poly methylmethacrylate (PMMA) which is exposed to a proton beam.…”

“…This approach is very powerful in that all of the optical surfaces are aligned to each other with an accuracy that is limited only by the precision of the positioning system that is used to move the work piece through the beam. Typically this process also yields optically smooth surfaces (down to 20 nm [1]). However there are limits in terms of the thickness of material that can be machined this way (due to absorption of the beam), the size of the total piece and also to the types of shapes that can be fabricated.…”

“…Here we use 'micro-optical' to include any system in which light propagates as an unguided wave in at least part of the system, and where the optical beams have dimensions of microns to millimeters. Computer interconnects typically require parallel point-to-point links, and examples of such systems include intra-chip links [1], interchip links [2] and interboard systems [3,4], where light is relayed via either single channel microlenses or microlens image relays. However, a point-to-point link can also incorporate a complex remapping of the parallel data array, as demonstrated in reference [2] in order to perform information processing tasks.…”