2021
DOI: 10.1039/d1na00237f
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Plasmonic metal nanostructures with extremely small features: new effects, fabrication and applications

Abstract: Surface plasmons in metals promise bunches of interesting and fascinating properties and applications in optics, sensing, photonics and nonlinear fields. Plasmonic nanostructures with extreme small features especially demonstrate amazing new...

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Cited by 28 publications
(17 citation statements)
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“…The actual correlation can be done by pattern recognition 87 or careful patterning of the substrates. 88 A detailed correlation between optical properties and subnm features of metal NSs, 89,90 such as sub-nm gap size and NS morphology, [91][92][93][94][95][96][97] can be achieved in this manner. This is particularly important for understanding charge transfer in metal NSs, either through direct contact or electron tunneling.…”
Section: Combination Of Single-particle Optical Spectroscopy and 2d/3...mentioning
confidence: 99%
“…The actual correlation can be done by pattern recognition 87 or careful patterning of the substrates. 88 A detailed correlation between optical properties and subnm features of metal NSs, 89,90 such as sub-nm gap size and NS morphology, [91][92][93][94][95][96][97] can be achieved in this manner. This is particularly important for understanding charge transfer in metal NSs, either through direct contact or electron tunneling.…”
Section: Combination Of Single-particle Optical Spectroscopy and 2d/3...mentioning
confidence: 99%
“…Besides, the solar spectra region of the surface plasmon resonance wavelength (λ SPR ) is strongly dependent on the size, shape, and concentration of MNS. Particularly, metal nanoparticles (MNPs) become very attractive due to their flexibility, straightforward synthetic, and high-uniform contribution [11,12]. Small sizes of MNPs (below 50 nm) are supposed to induce the intensive near-field localization; then, generate the light scattering in the board area of solar spectra [13,14].…”
Section: Introductionmentioning
confidence: 99%
“…Ongoing efforts aim to realize patterning below 5 nm to extend Moore's law for integrated circuit technology and memory devices. The ability to fabricate features or their spacings below 5 nm would also advance research for the development of metasurfaces, 4,5 optoelectronic devices, 6 and quantum technologies. 7−9 However, it is unclear whether EUV lithography can reliably pattern features below 5 nm, 10,11 and the extremely high cost of EUV systems is prohibitive for research purposes that require prototyping or for small-volume production markets.…”
mentioning
confidence: 99%
“…[4] The underlying Si substrate is then etched using Cl 2 / Ar ICP RIE to transfer the anisotropic pattern. [5] The NC mask layer is removed via liftoff of the underlying SiO 2 layer using a 10% HF wet etch. The magnified view of the patterned substrate shows lateral dimensions A, B, C, and D, which are set by the NC mask size, spacing s, which is set by the interparticle spacing of the NC assembly, and etch depth d, which is determined by the dry etch conditions.…”
mentioning
confidence: 99%
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