Photonic
applications of up-conversion luminescence (UCL) suffer
from poor external quantum yield owing to a low absorption cross-section
of UCL nanoparticles (UCNPs) doped with lanthanide ions. In this regard,
plasmonic nanostructures have been proposed for enhancing UCL intensity
through strong electromagnetic local-field enhancement; however, their
intrinsic ohmic loss opens additional nonradiative decay channels.
Herein, we demonstrate that dielectric metasurfaces can overcome this
disadvantage. A periodic array of amorphous-silicon nanodisks serves
as a metasurface on which a layer of UCNPs is self-assembled. Sharp
resonances supported by the metasurface overlap the absorption wavelength
(λ = 980 nm) of UCNPs to excite them, resulting in the enhancement
of UCL intensity. We further sharpen the resonances through rapid
thermal annealing (RTA) of the metasurface, crystallizing silicon
to reduce intrinsic optical losses. By optimizing the RTA condition
(at 1000 °C for 20 min in N2/H2 (3 vol
%) atmosphere), the resonance quality factor improves from 17.2 to
32.9, accompanied by an increase in the enhancement factor of the
UCL intensity from 86- to over 600-fold. Moreover, a reduction in
the intrinsic optical losses mitigates the UCL thermal quenching under
a high excitation density. These findings provide a strategy for increasing
light–matter interactions in nanophotonic composite systems
and promote UCNP applications.