Plasma Treatments and Light Extraction from Fluorinated CVD-Grown (400) Single Crystal Diamond Nanopillars

Abstract

We investigate the possibilities to realize light extraction from single crystal diamond (SCD) nanopillars. This was achieved by dedicated 519 nm laser-induced spin-state initiation of negatively charged nitrogen vacancies (NV−). We focus on the naturally-generated by chemical vapor deposition (CVD) growth of NV−. Applied diamond was neither implanted with 14N+, nor was the CVD synthesized SCD annealed. To investigate the possibility of light extraction by the utilization of NV−’s bright photoluminescence at room temperature and ambient conditions with the waveguiding effect, we have performed a top-down nanofabrication of SCD by electron beam lithography (EBL) and dry inductively-coupled plasma/reactive ion etching (ICP-RIE) to generate light focusing nanopillars. In addition, we have fluorinated the diamond’s surface by dedicated 0 V SF6 ICP plasma. Light extraction and spin manipulations were performed with photoluminescence (PL) spectroscopy and optically detected magnetic resonance (ODMR) at room temperature. We have observed a remarkable effect based on the selective 0 V SF6 plasma etching and surprisingly, in contrast to literature findings, deactivation of NV− centers. We discuss the possible deactivation mechanism in detail.

Coupling Long‐Range Raman with X‐Ray Photoelectron Spectroscopy for Complementary Bulk and Surface Characterization of Battery Materials

“…The Raman spectrometer was calibrated using an argon lamp. All in‐chamber Raman spectra were calibrated on a (400) CVD‐grown single‐crystal (SC) diamond, synthesized according to the procedure described elsewhere [23,24] . The laser power was varied as detailed in the following: ex‐chamber measurements of Li x V 2 O 5 and V 2 O 5 , as well as of all starting materials for the synthesis, were recorded at 2.3 mW power with the laser spot size varying, depending on sample roughness, but always in the range of 5 μm.…”

“…All in-chamber Raman spectra were calibrated on a (400) CVD-grown single-crystal (SC) diamond, synthesized according to the procedure described elsewhere. [23,24] The laser power was varied as detailed in the following: ex-chamber measurements of Li x V 2 O 5 and V 2 O 5 , as well as of all starting materials for the synthesis, were recorded at 2.3 mW power with the laser spot size varying, depending on sample roughness, but always in the range of 5 μm. For the in-chamber measurements, the laser power was increased to 35 mW and the radiation was focused onto the sample with the help of a Raman probe-head (Kaiser Optical, USA) equipped with a standard commercial 100x Canon camera objective (F5.6).…”

Correction: Radtke et al. Plasma Treatments and Light Extraction from Fluorinated CVD-Grown (400) Single Crystal Diamond Nanopillars. C 2020, 6, 37

“…The authors would like to update the XPS spectrum in Figure 3c. In the original article [1], wrong data is mistakenly displayed in Figure 3c. The corrected Figure 3 appears below and shows the correct XPS data, also proving the presence of fluorine on the surface after the plasma treatment of the diamond.…”