2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings 2006
DOI: 10.1109/icsict.2006.306563
|View full text |Cite
|
Sign up to set email alerts
|

Plasma Treatment on the Plastic Substrates for Liquid Phase Deposited SiO2 Films for Flexible Electronics Applications

Abstract: Liquid phase deposition (LPD) method to grow the silicon dioxide interlayer on the PES plastic substrates with the O 2 /Ar plasma pre-treatment is investigated. After which, the interlayer on the plastic substrates is grown and the films' quality on the substrates with or without the plasma pre-treatment is examined by using scanning electron microscopy, etching rate of the oxide layer by the diluted HF solution and surface leakage current measurement. The pentacene-based organic thin film transistors on the d… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Publication Types

Select...

Relationship

0
0

Authors

Journals

citations
Cited by 0 publications
references
References 9 publications
(9 reference statements)
0
0
0
Order By: Relevance

No citations

Set email alert for when this publication receives citations?