Plasma source ion implantation using high-power pulsed RF plasma

Han, Seunghee; Lee, Yeon-Hee; Kim, Youngwoo; Kim, Youngsoo; Chun, Hyejin; Lee, Junghye

doi:10.1016/j.surfcoat.2004.04.045

Cited by 3 publications

(2 citation statements)

References 9 publications

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“…RF-generated plasma is a mul-tifunctional tool for etching of the surface or plasma-enhanced chemical vapor deposition, with thermal energy of the electrons being few eV, bringing the atoms to excited state and inducing chemical reaction. Still, the temperature of the electron gas remains low (near room-temperature), allowing modifications of sensitive surfaces, such as biopolymers [22,23]. The closed reactor system offers the possibility of gas capturing and recycling, preventing harmful gas exhaust into the environment [24,25].…”

Section: Introductionmentioning

confidence: 99%

Permanent hydrophobic coating of chitosan/cellulose nanocrystals composite film by cold plasma processing

Oberlintner

Vesel

Naumoska

et al. 2022

Applied Surface Science

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Section: Introductionmentioning

confidence: 99%

Permanent hydrophobic coating of chitosan/cellulose nanocrystals composite film by cold plasma processing

Oberlintner

Vesel

Naumoska

et al. 2022

Applied Surface Science

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“…They employed a main control system software design method based on VHDL for welding process timing and welding arc stability control. The welding quality was found to be satisfactory [27]. At the South China University of Technology, Xiaoming Lu and his team designed a complete software and hardware system using DSP and developed a digital MIG welding power source.…”

Section: Figure 8 Structure Diagram Of Inverter Arc Welding Machine P...mentioning

confidence: 99%

Review on the Research Progress of Arc Plasma Power Sources in China

Jin,

Li,

Jiang

et al. 2023

IEEE Access

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Arc plasma, characterized by its high current density, high energy concentration, and elevated gas enthalpy, is widely utilized in fields such as metallurgy, chemical industry, energy and environmental protection, as well as aerospace. Plasma treatment of solid waste is one of the advanced environmental protection technologies at the international forefront. The rapid development of plasma technology has led to continuous updates and upgrades of arc plasma power sources. This paper provides a comprehensive review of the research progress in arc plasma technology in China, with a particular focus on two key aspects: structure and control methods. The objective is to provide a novel perspective and insights for the international academic community, thereby driving further development in the field of arc plasma power sources. Furthermore, it discusses and analyzes the future development of arc plasma power sources with a focus on achieving higher system reliability, increased power output, environmentally friendly solutions, and intelligent operation.

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Possibility of SOI Fabrication Using Plasma Source Ion Implantation with High-Power Pulsed RF Plasma

Kim

Han

2009

Fusion Science and Technology

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Plasma source ion implantation using high-power pulsed RF plasma

Cited by 3 publications

References 9 publications

Permanent hydrophobic coating of chitosan/cellulose nanocrystals composite film by cold plasma processing

Permanent hydrophobic coating of chitosan/cellulose nanocrystals composite film by cold plasma processing

Review on the Research Progress of Arc Plasma Power Sources in China

Possibility of SOI Fabrication Using Plasma Source Ion Implantation with High-Power Pulsed RF Plasma

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