Plasma response to nanoparticle growth

Mikikian, Maxime; Labidi, Safa; Wahl, Erik von; Lagrange, Jean-François; Lecas, Thomas; Massereau-Guilbaud, Véronique; Géraud-Grenier, Isabelle; Kovačević, Eva; Berndt, Johannes; Kersten, Holger; Gibert, Titaïna

doi:10.1063/1.5020407

Cited by 3 publications

(3 citation statements)

References 18 publications

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“…This is also consistent with the Laser Light Scattering (LLS) signal at 532 nm that is continuously increasing as a function of time as nanoparticles are growing. The evolution of the observed lines is particularly interesting as similar behaviors have been observed in another reactor (PKE-Nefedov) where the sputtered film is slightly different [1]. It could suggest that the evolution of carbonaceous lines is relatively similar when nanoparticles are formed from the sputtering of a carbon-based film.…”

Section: Optical Emission Spectroscopysupporting

confidence: 68%

“…In the experimental conditions tested up to now, the formation of nanoparticles directly in the gas phase has not been obtained but the ethanol decomposition leads to the formation of a dense brown film on the electrodes. Experiments using pure argon show that this carbon-based film can be sputtered leading to the injection of molecular precursors in the plasma and then to nanoparticle formation [1]. The nanoparticle growth can be followed thanks to many installed diagnostics: electrical probe, Langmuir probe with an automated linear drive, energy resolved mass spectrometer, optical emission spectrometer, illuminating system with a green laser at 532 nm and both a standard CCD camera and a high-speed camera.…”

Section: Methodsmentioning

confidence: 99%

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Nanoparticle growth in ethanol based plasmas

Labidi¹,

Lecas²,

Kovačević³

et al. 2018

AIP Conference Proceedings

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Section: Optical Emission Spectroscopysupporting

confidence: 68%

Section: Methodsmentioning

confidence: 99%

Nanoparticle growth in ethanol based plasmas

Labidi¹,

Lecas²,

Kovačević³

et al. 2018

AIP Conference Proceedings

Self Cite

View full text Add to dashboard Cite

“…Results of the spectroscopic and probe investigations of the plasma conditions within the void were controversial. The electron energies in the void were qualitatively investigated using line-ratio method [147,294,295] and were found to be lower inside the void region compared with those inside the dust suspension. On the other hand, measurements with a Langmuir probe by Schulze et al [234] revealed that both the electron temperature and density are higher inside the void than in the suspension.…”

Section: Voidmentioning

confidence: 99%

Physical aspects of dust–plasma interactions

Pustylnik

Pikalev

Zobnin

et al. 2021

Contributions to Plasma Physics

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Low‐pressure gas discharge plasmas are known to be strongly affected by the presence of small dust particles. This issue plays a role in the investigations of dust particle‐forming plasmas, where the dust‐induced instabilities may affect the properties of synthesized dust particles. Also, gas discharges with large amounts of microparticles are used in microgravity experiments, where strongly coupled subsystems of charged microparticles represent particle‐resolved models of liquids and solids. In this field, deep understanding of dust–plasma interactions is required to construct the discharge configurations which would be able to model the desired generic condensed matter physics as well as, in the interpretation of experiments, to distinguish the plasma phenomena from the generic condensed matter physics phenomena. In this review, we address only physical aspects of dust–plasma interactions, that is, we always imply constant chemical composition of the plasma as well as constant size of the dust particles. We also restrict the review to two discharge types: dc discharge and capacitively coupled rf discharge. We describe the experimental methods used in the investigations of dust–plasma interactions and show the approaches to numerical modelling of the gas discharge plasmas with large amounts of dust. Starting from the basic physical principles governing the dust–plasma interactions, we discuss the state‐of‐the‐art understanding of such complicated, discharge‐type‐specific phenomena as dust‐induced stratification and transverse instability in a dc discharge or void formation and heartbeat instability in an rf discharge.

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Anti-contamination SMART (Spectrum Monitoring Apparatus with Roll-to-roll Transparent film) window for optical diagnostics of plasma systems

Kim

Lee

Jeong

et al. 2021

Review of Scientific Instruments

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Optical emission spectroscopy is widely used in semiconductor and display manufacturing for plasma process monitoring. However, because of the contamination of the viewport, quantitative analysis is extremely difficult; therefore, qualitative analysis is used to detect species in the process. To extend plasma monitoring in advanced precise processes, the contamination problem of the viewport must be solved. We propose a new spectrum monitoring apparatus with a roll-to-roll transparent film window for optical diagnostics of a plasma system. By moving a transparent film in front of the viewport, contamination in the emission light path becomes negligible. However, the speed of the film should be optimized to reduce the maintenance period and to minimize measurement errors. We calculated the maximum thickness of SiO2, Si3N4, ITO, and the Ar/CHF3 plasma contaminant to suppress the electron temperature error measured by the line-intensity-ratio within 2% at 2 eV. The thickness of the Si3N4, ITO, and Ar/CHF3 plasma contaminant should be thinner than 12.5 nm, 7.5 nm, and 100 nm, respectively.

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Plasma response to nanoparticle growth

Cited by 3 publications

References 18 publications

Nanoparticle growth in ethanol based plasmas

Nanoparticle growth in ethanol based plasmas

Physical aspects of dust–plasma interactions

Anti-contamination SMART (Spectrum Monitoring Apparatus with Roll-to-roll Transparent film) window for optical diagnostics of plasma systems

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