“…Kita [191,197,199] performed plasma polymerization of tetraethoxysilane (TEOS) and perfluoro-n-hexane (PFH) in order to control the size of the zeolitic membrane pores. Furthermore, he analyzed gas permeation at 35±200 C using single-component H 2 , He, CO 2 , N 2 , CH 4 , and SF 6 .…”