1995
DOI: 10.2494/photopolymer.8.385
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Plasma polymerization of perfluoroalkanes over zeolite membrane and the gas permeability of the membrane.

Abstract: Plasma polymerization of perfluoro-n-hexane, hexafluoroethane and tetrafluoromethane is investigated. The deposition rate of plasma-2. Experimental Perfluoro-n-hexane obtained from Tokyo Kasei Kogyo Co. and hexafluoroethane, tetrafluoromethane, and methane gas obtained from Sumitomo Seika Chemical Co. were used as a

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Cited by 4 publications
(2 citation statements)
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“…Kita [191,197,199] performed plasma polymerization of tetraethoxysilane (TEOS) and perfluoro-n-hexane (PFH) in order to control the size of the zeolitic membrane pores. Furthermore, he analyzed gas permeation at 35±200 C using single-component H 2 , He, CO 2 , N 2 , CH 4 , and SF 6 .…”
Section: Separation Through Pervaporationmentioning
confidence: 99%
See 1 more Smart Citation
“…Kita [191,197,199] performed plasma polymerization of tetraethoxysilane (TEOS) and perfluoro-n-hexane (PFH) in order to control the size of the zeolitic membrane pores. Furthermore, he analyzed gas permeation at 35±200 C using single-component H 2 , He, CO 2 , N 2 , CH 4 , and SF 6 .…”
Section: Separation Through Pervaporationmentioning
confidence: 99%
“…Fluxes and separation properties decrease with time probably due to pore obstruction caused by feed impurity or by species produced in catalytic reactions. Kita [191,197,199] prepared three different membranes formed by zeolite layers (A, ZSM-5 and Y) on cylindrical alumina supports, and he analyzed them with respect to pervaporation and vapor permeation. The zeolitic membrane with NaA films was found to be highly selective for water, and is characterized by high fluxes.…”
Section: Separation Through Pervaporationmentioning
confidence: 99%