Plasma immersion ion implantation on polymers

Abstract

2.1 MODIFICATION OF POLYMERS BY PIIID 11 2.1.1 Polymer structure 12 2.2 SURFACE COMPOSITION OF ION MODIFIED POLYMERS 13 2.3 ION-POLYMER INTERACTIONS 15 2.4 THERMAL SPIKES IN ION IMPLANTATION OF POLYMERS 18 2.5 ELECTRONIC TRANSPORT MECHANISM OF ION MODIFIED POLYMERS 23 2.6 PLASMA IMMERSION ION IMPLANTATION (PHI) 25 2.6.1 Description of the PHI system 28 111 ATTENTION: The Singapore Copyright Act applies to the use of this document. Nanyang Technological University Library 2.6.2 Plasma immersion ion implantation for insulating materials 2.6.2.1 Rise time and ion energy range in PHI 2.6.2.2 Sputtering process 2.6.2.3 Determination of ion energies and incident ion dose rate 2.6.2.4 Charging effects on an insulator's surface 2.6.2.5 Design of experimental setup for insulators 2.6.2.6 Pulse frequency and duration 2.7 CATHODIC ARC SOURCES 2.7.7 Filtered cathodic vacuum arc system 39 2.7.2 Metal cathodic arc source 42 2.8 SUMMARY 43 CHAPTER 3: CHARACTERIZATION TECHNIQUES 44 3.1 VISIBLE RAMAN SPECTROSCOPY 45 3.2 X-RAY PHOTOELECTRON SPECTROSCOPY (XPS) 46 3.3 SCANNING ELECTRON MICROSCOPY (SEM) 47 3.4 X-RAY DIFF ACTION (XRD) 48 3.5 SURFACE PROFILER 49 3.6 CONDUCTIVE ATOMIC FORCE MICROSCOPY (CAFM) 49 3.7 MECHANICAL TESTING 52