The active screen plasma nitrocarburizing technology significantly reduces the risk of cementite precipitation in the compound layer of nitrocarburized materials and of soot production compared to conventional plasma nitrocarburizing. In a laboratory-scaled plasma nitriding monitoring reactor, PLANIMOR, using an active screen made of carbon, low-pressure pulsed dc N 2 -H 2 plasmas have been studied by infrared laser absorption spectroscopy (IRLAS) techniques. Applying IRLAS, using tunable diode lasers (TDL) and a quantum cascade laser (QCL) as radiation sources, the evolution of the concentrations of eight stable molecular reaction products, C 2 H 2 , C 2 H 4 , CH 4 , HCN, NH 3 , CO, C 2 H 6 , and C 2 N 2 , and of the CH 3 radical, have been monitored. By using the line ratio method, the rotational temperatures of HCN and CO could be determined in a range of 300-400 K and 300-500 K, respectively. Analysing the profile of the CH 3 Q(3-3) absorption line, the gas temperature of this radical, i.e. the temperature in the vicinity of the plasma zone, has been found to range between 400-800 K. The concentrations of the detected molecular reaction products were found to be in the range of 10 12 -10 16 molecules cm −3 with HCN and NH 3 as the most abundant reaction products. Additionally, the respective conversion efficiencies to the product molecules (R C ≈5×10 12 -2×10 16 molecules J −1 ) have been determined for different mixing ratios of N 2 :H 2 in the feed gas and plasma power values. Taking into account the concentrations of all carbon-containing species, a maximum of the carbon combustion of the screen material of up to 96 mg h −1 has been found for a N 2 -H 2 ratio of 1:1 and the highest plasma power of the screen of P screen =106 W.