Plasma enhanced CVD deposition of titanium oxide for biomedical applications

Photocatalytic activity of thin TiO2 films deposited using sol–gel and plasma enhanced chemical vapor deposition methods

“…TiO 2 coatings can be prepared by a number of deposition techniques, such as the sol-gel process [3,[16][17][18][19], reactive sputtering [10,13], chemical vapor deposition [20], spray pyrolysis [21], or plasma enhanced chemical vapor deposition (PECVD) [22][23][24]. Due to its simplicity and low costs, the sol-gel method is the most popular.…”

“…On the other hand, the PECVD method, which requires much lower temperatures and allows one to deposit coatings onto temperature-sensitive substrates, is not very frequently used for that purpose. In our previous papers, we described amorphous coatings, obtained with the PECVD technique, which exhibited both strong bactericidal activity and considerable superhydrophilic effect on their exposure to UV light [22][23][24]. Unfortunately, a comparison of these results with those obtained by other workers is very difficult, if not impossible, mainly due to a deficiency of standard conditions of irradiation (power of radiation, distance from the sample, radiation spectrum, time of illumination, air temperature and humidity).…”

Cr-Doped TiO<sub>2</sub> Thin Films Prepared by Means of a Magnetron Co-Sputtering Process: Photocatalytic Application

“…In the same line, TiO 2 thin films have been tested in various electronic and optoelectronic devices such as: photovoltaic solar cells [2], gas sensors [3], electrochromic displays and photocatalyst [4]. Thin films of this oxide have been obtained by diffrent vacuum techniques especially via chemical vapor deposition [5], pulsed laser deposition [6] and sputtering [7].…”

Multifunctional Textiles – Modification by Plasma, Dyeing and Nanoparticles

“…Cotton also showed self-cleaning properties after RF plasma and TiO 2 treatment [35]. TiO 2 on textile substrates is also used for a biomedical application to improve antimicrobial effectiveness of the fabric [36]. By using oxygen radiofrequency plasma at a higher power input, the roughness of fibers increased and likewise the adhesion of TiO 2 onto treated fabric.…”