Plasma-Enhanced Chemical Vapor Deposition of Functional Coatings

Martinů, L.; Zabeida, O.; Klemberg-Sapieha, J.E.

doi:10.1016/b978-0-8155-2031-3.00009-0

Cited by 48 publications

(48 citation statements)

References 182 publications

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“…Alternatively, chemical reactions may be used by intend. They create a thin-film, for instance by the reaction of two precursors in gaseous state, representing a chemical vapor deposition (CVD) [1,[11][12][13][14]. PVD and CVD are dry processes, with a majority conducted under vacuum conditions.…”

Section: Introduction Into Depositionmentioning

confidence: 99%

Deposition Technologies

Gatzen¹,

Saile²,

Leuthold³

2015

Micro and Nano Fabrication

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Deposition of thin-films used in MEMS and NEMS devices rely on a wide variety of technologies. Physical vapor deposition (PVD) uses physical effects like evaporation or ion bombardment to create thin-films on a substrate by forcing source atoms into a gaseous phase. Chemical vapor deposition (CVD) and similar processes create coatings by a chemical reaction of volatile species by using reaction processes defined by chemical reaction equations. While PVD and CVD are dry processes, for depositing conductive thin-films the substrate may be submerged in an electrically conductive liquid (an electrolyte) and subjected to electrochemical or chemical deposition. Spin-coating and spray-coating are two examples of technologies that lend themselves to creating organic films-a technology widely used in depositing photoresists in photolithography. Dip processes like solgel may be used for the creation of oxide coatings.

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Section: Introduction Into Depositionmentioning

confidence: 99%

Deposition Technologies

Gatzen¹,

Saile²,

Leuthold³

2015

Micro and Nano Fabrication

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“…Again, due to the difference in temperature gradient of the steel substrate and carbon nitride film layer, thermal stress is induced at the interface [35]. These high compressive and thermal residual stresses tend to detach the film from the substrate after a critical film thickness.…”

Section: Hipims Deposition Processmentioning

confidence: 99%

“…The HiPIMS deposition process used in this experiment is a class of plasma-based sputtering process such as PECVD [34] in which gas phase chemistry is activated by using the energy from plasma discharge rather than using external thermal energy [35]. In reactive HiPIMS so-called impulses (unipolar pulses) containing high power are applied to the magnetron target at low duty cycle (0.5-5%) and at low pulse frequency (50 Hz to 5 kHz) while keeping the average power less than 2 orders of magnitude of the peak discharge power [36].…”

Section: Hipims Deposition Processmentioning

confidence: 99%

Manufacturing and Characterization of a Carbon-Based Amorphous (a-CNX) Coating Material

Rashid

Archenti

2018

Nanomanuf Metrol

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A thick 400-micron amorphous carbon nitride (a-CN X ) coating material was synthesized by means of plasma-enhanced chemical vapor deposition process. High-power impulse magnetron sputtering technique was used to sputter a pure graphite target plate in reactive argon (Ar), nitrogen (N 2 ) and acetylene (C 2 H 2 ) environment for depositing the composite coating. Structural and chemical/elemental composition of the a-CN X composite material was investigated by field emission scanning electron microscopy, energy-dispersive X-ray spectroscopy and micro-Raman spectroscopy. The rootmean-square surface roughness (S q ) and structure were estimated by atomic force microscopy. Mechanical properties such as hardness and Young's modulus (Oliver-Pharr method) at room temperature were characterized by Vickers microindentation test. Operational temperature test of the deposited a-CN X coating reveals that it can withstand up to 400°C without cracking. An inverted shaker test, based on central impedance method, was adopted to investigate the dynamic damping property of the coating material, and it was found that the first bending mode damping lossfactor of the reported a-CN X coating is 0.015 ± 0.001 and corresponding loss modulus (Young's modulus multiplied by lossfactor) is 0.234 ± 0.011 GPa.

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“…The two parts obtained are assembled through a thermo-mechanical process (s.c. "Punch press") and then grinded. Conventional surface treatments are completely replaced by the innovative Plasma-Enhanced Chemical Vapour Deposition (PECVD) treatment [33]. This is a process by which thin films of various materials can be deposited on substrates at lower temperature than that of standard Chemical Vapour Deposition (CVD).…”

Section: General Features and Aims Of The Proposed Eco-innovationmentioning

confidence: 99%

Life Cycle Assessment of Process Eco-Innovations in an SME Automotive Supply Network

Raggi

Pietro²

2015

Sustainability

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Abstract:The aim of the study presented in this article is to assess, from an environmental standpoint, a set of eco-innovations applied to the production process of an automotive component. The eco-innovations were developed by a supply network of small-and medium-sized enterprises (SMEs) in the framework of a project named "Hi-reach". The component considered is a motorcycle rear wheel spindle. The conventional version is obtained by machining a single forged steel part. The Hi-reach version is indeed manufactured by joining a shaft to a flange; in addition, conventional surface treatments are replaced by a plasma-enhanced chemical vapour deposition (PECVD) treatment and other machining steps are improved. This process was conceived with the aim of maintaining (or enhancing) the technical performance of the spindle and reducing production costs. A Life Cycle Assessment (LCA) was carried out to compare the two scenarios described. Those eco-innovations resulted in significant improvements of the environmental performance of the analysed component, ranging, on average, between 50% and 70% for the impact indicators considered. Our results also highlight the role of SMEs in promoting process eco-innovations and the increasing relevance of LCA as a tool to support decision making in manufacturing.

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Plasma-Enhanced Chemical Vapor Deposition of Functional Coatings

Cited by 48 publications

References 182 publications

Deposition Technologies

Deposition Technologies

Manufacturing and Characterization of a Carbon-Based Amorphous (a-CNX) Coating Material

Life Cycle Assessment of Process Eco-Innovations in an SME Automotive Supply Network

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